US 6,982,006 B1
Method and apparatus for treating a substrate with an ozone-solvent solution
David G. Boyers, 558 Fir La., Los Altos, Calif. 94024 (US); and Jay Theodore Cremer, Jr., 2181 Park Blvd., Palo Alto, Calif. 94306 (US)
Filed on Oct. 19, 2000, as Appl. No. 9/693,012.
Claims priority of provisional application 60/160435, filed on Oct. 19, 1999.
Int. Cl. C23G 1/02 (2006.01)
U.S. Cl. 134—3 39 Claims
OG exemplary drawing
 
1. A method for treating a material, comprising:
forming an ozone-solvent solution at a first temperature;
passing said ozone-solvent solution through a heater to heat said ozone-solvent solution from said first temperature to form a heated [−]ozone-solvent solution relative to said first temperature, such that said heated ozone-solvent solution is supersaturated with ozone; and
reacting the supersaturated heated ozone-solvent solution with the material at a second temperature;
wherein the first temperature is less than the second temperature.