US 6,981,416 B2
Multi-axis solid state accelerometer
Shyu-Mou Chen, Taoyuan (Taiwan); Ming-Chun Huang, Taoyuan (Taiwan); and Chung-Ta Kau, Taoyuan (Taiwan)
Assigned to Chung-Shan Institute of Science and Technology, Taoyuan (China)
Filed on Nov. 21, 2003, as Appl. No. 10/717,617.
Prior Publication US 2005/0109108 A1, May 26, 2005
Int. Cl. G01P 15/125 (2006.01)
U.S. Cl. 73—510 30 Claims
OG exemplary drawing
 
1. A multi-axis accelerometer comprising:
a main structure made of electricity conductive material and including a first proof mass and a second proof mass which are connected to a frame by sensing beams, the frame fixed between two boards, the first and the second proof masses movable only along a first axis and a second axis parallel to the boards, the first and the second proof masses each having grooves defined in each surface thereof and the grooves being perpendicular to the first axis and the second axis, respectively;
two sets of interposed stripe electrodes on each board and located in parallel with the grooves in the first proof mass, each set of the electrodes electrically connected to a bond pad, so as to form two first axis detection capacitors with a surface of the first proof mass, wherein when the acceleration has a component on the first axis, the capacitances of the first axis capacitors change and the change is transferred into a first axis acceleration signal via a circuit, and
two sets of interposed stripe electrodes on each board and located in parallel with the grooves in the second proof mass, each set of electrodes electrically connected to a bond pad, so as to form two second axis detection capacitors with a surface of the second proof mass, wherein when the acceleration has a component on the second proof mass, wherein when the acceleration has a component on the second axis, the capacitances of the second axis capacitors change and the change is transferred into a second axis acceleration signal via a circuit.