US 6,982,176 B2
Method for monitoring production of pixel detectors and detectors produced thereby
Aaron Judy Couture, Schenectady, N.Y. (US); Douglas Albagli, Clifton Park, N.Y. (US); and George Edward Possin, Niskayuna, N.Y. (US)
Assigned to General Electric Company, Niskayuna, N.Y. (US)
Filed on Oct. 30, 2003, as Appl. No. 10/696,881.
Prior Publication US 2005/0092986 A1, May 05, 2005
Int. Cl. H01L 21/66 (2006.01)
U.S. Cl. 438—14 22 Claims
OG exemplary drawing
 
1. A method for monitoring the quality of a manufacturing process for making detector panels comprising a plurality of pixels in a two-dimensional array, said method comprising:
in each detector panel, manufacturing a set of baseline pixels and a set of test pixels wherein each test pixel comprises an electrical component having a geometric dimension varied by an amount sufficient to introduce a measurable variation in a test to measure parameters of pixels dependent upon the varied dimension;
performing the test on the set of baseline pixels and the set of varied pixels;
analyzing the results of the test; and
adjusting parameters of the manufacturing process in accordance with said analysis.