US 6,981,806 B2 | ||
Micro-hermetic packaging of optical devices | ||
Albert M. Benzoni, South Pasadena, Calif. (US); Henry A. Blauvelt, San Marino, Calif. (US); David W. Vernooy, Sierra Madre, Calif. (US); and Joel S. Paslaski, Alhambra, Calif. (US) | ||
Assigned to Xponent Photonics Inc, Monrovia, Calif. (US) | ||
Filed on Jul. 03, 2003, as Appl. No. 10/613,226. | ||
Claims priority of provisional application 60/473699, filed on May 27, 2003. | ||
Claims priority of provisional application 60/393974, filed on Jul. 05, 2002. | ||
Prior Publication US 2004/0052480 A1, Mar. 18, 2004 | ||
Int. Cl. G02B 6/00 (2006.01); G02B 6/36 (2006.01) |
U.S. Cl. 385—94 | 22 Claims |
1. An optical apparatus, comprising:
a planar waveguide substrate;
a micro-hermetic cavity formed on the waveguide substrate;
a planar transmission optical waveguide formed on the waveguide substrate for enabling optical power transfer between an interior
volume of the micro-hermetic cavity and a volume exterior thereto; and
means for sealing the micro-hermetic cavity,
wherein:
walls of the micro-hermetic cavity completely circumscribe the interior volume; and
a portion of the transmission optical waveguide integrally forms a portion of one of the walls of the micro-hermetic cavity
at a position where the waveguide passes through the wall.
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