US 6,982,567 B2
Combination optical and electrical metrology apparatus
Walter Lee Smith, Livermore, Calif. (US)
Assigned to Therma-Wave, Inc., Fremont, Calif. (US)
Filed on May 11, 2004, as Appl. No. 10/843,192.
Application 10/205868 is a division of application No. 09/519051, filed on Mar. 03, 2000, abandoned.
Application 10/843192 is a continuation of application No. 10/205868, filed on Jul. 26, 2002, granted, now 6,791,310.
Claims priority of provisional application 60/124715, filed on Mar. 15, 1999.
Prior Publication US 2004/0207427 A1, Oct. 21, 2004
This patent is subject to a terminal disclaimer.
Int. Cl. G01R 31/26 (2006.01)
U.S. Cl. 324—765 10 Claims
OG exemplary drawing
 
1. An apparatus for evaluating a sample comprising:
a first measurement module for performing non-contact electrical measurements of the sample corresponding to electrical characteristics and generating first output signals responsive thereto;
a second measurement module for performing non-contact optical measurements of the sample corresponding to composition characteristics of the sample and generating second output signals responsive thereto; and
a processor for evaluating the sample based on a combination of the electrical and optical measurements represented by said first and second output signals.