US 6,982,792 B1 | ||
Spectrophotometer, ellipsometer, polarimeter and the like systems | ||
John A. Woollam, Lincoln, Nebr. (US); Steven E. Green, Lincoln, Nebr. (US); Ping He, Lincoln, Nebr. (US); Blaine D. Johs, Lincoln, Nebr. (US); Craig M. Herzinger, Lincoln, Nebr. (US); Galen L. Pfeiffer, Lincoln, Nebr. (US); Brian D. Guenther, Lincoln, Nebr. (US); and Martin M. Liphardt, Lincoln, Nebr. (US) | ||
Assigned to J.A. Woollam Co. INC, Lincoln, Nebr. (US) | ||
Filed on Feb. 28, 2003, as Appl. No. 10/376,677. | ||
Application 10/376677 is a continuation in part of application No. 09/531877, filed on Mar. 21, 2000, granted, now 6,535,286. | ||
Application 09/531877 is a continuation in part of application No. 10/178723, filed on Jun. 24, 2002. | ||
Application 10/178723 is a continuation in part of application No. 09/864840, filed on May 24, 2001, granted, now 6,456,376. | ||
Application 09/864840 is a continuation in part of application No. 09/845548, filed on Apr. 30, 2001, granted, now 6,585,128. | ||
Application 09/845548 is a continuation in part of application No. 09/583229, filed on May 30, 2000, granted, now 6,804,004. | ||
Claims priority of provisional application 60/431489, filed on Dec. 06, 2002. | ||
Claims priority of provisional application 60/427043, filed on Nov. 18, 2002. | ||
Claims priority of provisional application 60/424589, filed on Nov. 07, 2002. | ||
Claims priority of provisional application 60/300714, filed on Jun. 26, 2001. | ||
Int. Cl. G01J 4/00 (2006.01) |
U.S. Cl. 356—369 | 26 Claims |
1. An ellipsometer system for analyzing sample systems using electromagnetic radiation with wavelengths in the ultraviolet
wavelength range, said ellipsometer system comprising a chamber means which encompasses a substantially enclosed space, functionally
within said substantially enclosed space there being present:
a) source means for providing of a beam including ultraviolet wavelength range electromagnetic radiation;
b) polarization state setting means for setting a polarization state in at least a selected small range of wavelengths in
a beam including ultraviolet wavelength range electromagnetic radiation;
c) means which enables sequentially modifying a polarization state set by said polarization state setting means, through a
plurality of polarization states;
d) alignment detector means comprising a plurality of detector elements surrounding a substantially centrally located hole
through which a beam of electromagnetic radiation can pass, said substantially centrally located hole having a diameter sufficiently
large such that more intensity of a beam passes therethrough than does through a 1.27 mm diameter hole;
e) a means for placing and maintaining a sample system in a desired position and orientation, said means for placing and maintaining
a sample system in a desired position and orientation being positioned in a subspace of said substantially enclosed space
which can be sequestered by a subspace sequestering means;
f) data detector means for receiving an electromagnetic beam which is caused to interact with a sample system which is secured
in place by said means for placing and maintaining a sample system in a desired position and orientation; and
g) computer means for analyzing data provided by said data detector means for receiving an electromagnetic beam after it interacts
with said sample system;
h) monochromator means, for selecting a small range of wavelengths in a beam including ultraviolet wavelength range electromagnetic
radiation, present between said source means for providing of a beam including ultraviolet wavelength range electromagnetic
radiation and said data detector means for receiving an electromagnetic beam which is caused to interact with a sample system;
said chamber means having functionally affixed thereto means for causing said subspace sequestering means to become configured
so as to sequester a sample system in a subspace of said substantially enclosed space, or to open and expose said sample system
generally to the substantially enclosed space, and means for accessing said means for placing and maintaining a sample system
in a desired position and orientation;
said chamber further having means having functionally affixed thereto means for entering purging gas into said substantially
enclosed space generally, and to a subspace sequestered by said subspace sequestering means independently when it is caused
to be sequestered from said substantially enclosed space;
such that in use a sample system is caused to be affixed to said means for placing and maintaining a sample system in a desired
position and orientation via said means for accessing said means for placing and maintaining a sample system in a desired
position and orientation, and
purging gas is caused to be entered into said substantially enclosed space via said means for entering purging gas into said
substantially enclosed space generally, and/or to a subspace sequestered by said subspace sequestering means independently
when it is caused to be sequestered from said substantially enclosed space, and
said source means for providing of a beam including ultraviolet wavelength range electromagnetic radiation is caused to provide
a bean including ultraviolet wavelength, and said polarization state setting means for setting a polarization state in a selected
small range of wavelengths in a beam including ultraviolet wavelength range electromagnetic radiation is caused to impose
a polarization state thereupon and said beam of ultraviolet wavelength range electromagnetic radiation is caused to pass through
said hole in said alignment detector means comprising a plurality of detector elements surrounding a substantially centrally
located holes and said monochromator means for selecting a small range of wavelengths in said beam of ultraviolet wavelength
range;
and such that said means for placing and maintaining a sample system in a desired position and orientation is caused to orient
said sample system so that said beam including ultraviolet wavelength range electromagnetic radiation is caused to reflect
essentially directly back from said sample system such that the signals from each of the alignment detector means of said
plurality of detector elements provide optimum signal output, and then, without removing said alignment detector means of
said plurality of detector elements, causing said means for placing and maintaining a sample system in a desired position
and orientation is caused to reorient said sample system such that said beam including ultraviolet wavelength range electromagnetic
radiation impinges thereupon at a known angle of incidence;and such that said beam including ultraviolet wavelength range electromagnetic radiation interacts with said sample system
and then enters said data detector.
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