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US 6,981,761 B2 |
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Droplet discharge device and liquid filling method therefor, and device manufacturing apparatus, device manufacturing method
and device |
Takahiro Usui, Shiojiri (Japan); Hirofumi Teramae, Matsumoto (Japan); and Satoru Hosono, Toyoshina-machi (Japan) |
Assigned to Seiko Epson Corporation, Tokyo (Japan) |
Filed on Sep. 09, 2002, as Appl. No. 10/237,100. |
Claims priority of application No. 2001-274804 (JP), filed on Sep. 11, 2001; application No. 2001-274819 (JP), filed on Sep. 11, 2001; application No. 2002-074299 (JP), filed on Mar. 18, 2002; and application No. 2002-261163 (JP), filed on Sep. 06, 2002. |
Prior Publication US 2004/0070651 A1, Apr. 15, 2004 |
Int. Cl. B41J 2/175 (2006.01)
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