US 6,982,420 B2
Sample observation method and transmission electron microscope
Eiko Nakazawa, Mito (Japan); and Isao Nagaoki, Hitachinaka (Japan)
Assigned to Hitachi Science Systems Ltd., Ibaraki (Japan); and Hitachi High-Technologies Corp., Tokyo (Japan)
Filed on Nov. 25, 2003, as Appl. No. 10/720,251.
Claims priority of application No. 2002-343776 (JP), filed on Nov. 27, 2002.
Prior Publication US 2004/0114788 A1, Jun. 17, 2004
Int. Cl. G21K 7/00 (2006.01)
U.S. Cl. 250—311 10 Claims
OG exemplary drawing
 
1. A sample observation method comprising a step of recognizing an image of an object in a transmission electron beam image of a sample by comparing it with a previously stored reference image;
said sample observation method characterized by further comprising the steps of:
specifying the object in said transmission electron beam image;
computing a correlation between said specified object image and the stored reference image; and
displaying the result of computation for different tilt angles;
wherein multiple pairs of transmission electron beam images of multiple transmission electron beam images of multiple objects each having a different tilt angle with respect to the optical axis are stored as said reference images for said object.