US 6,982,454 B2
Metal-metal capacitor array
Horia Giuroiu, Campbell, Calif. (US); and Sorin Andrei Spanoche, Santa Clara, Calif. (US)
Assigned to Oki Electric Industry Co., Ltd., Tokyo (Japan)
Filed on Oct. 22, 2003, as Appl. No. 10/690,456.
Claims priority of provisional application 60/421779, filed on Oct. 29, 2002.
Prior Publication US 2004/0129966 A1, Jul. 08, 2004
Int. Cl. H01L 27/108 (2006.01)
U.S. Cl. 257—306 23 Claims
OG exemplary drawing
 
1. A capacitor comprising:
a first metal plate formed above a semiconductor substrate;
a second metal plate formed above the first metal plate, the second metal plate having an opening in a central portion thereof;
a third metal plate formed above the second metal plate;
an insulating material between the first, second and third metal plates and on the semiconductor substrate; and
a conductive member, formed through the insulating material and the opening of the second metal plate, that electrically connects the first and third metal plates.