US 6,982,211 B2
Water jet processing method
Koichi Yajima, Tokyo (Japan); Satoshi Tateiwa, Tokyo (Japan); and Kazuma Sekiya, Tokyo (Japan)
Assigned to Disco Corporation, Tokyo (Japan)
Filed on Dec. 01, 2004, as Appl. No. 10/999,963.
Claims priority of application No. 2003-403292 (JP), filed on Dec. 02, 2003; and application No. 2003-408676 (JP), filed on Dec. 08, 2003.
Prior Publication US 2005/0196940 A1, Sep. 08, 2005
Int. Cl. H01L 21/301 (2006.01)
U.S. Cl. 438—460 6 Claims
OG exemplary drawing
 
1. A water jet processing method for cutting a workpiece having a first group composed of first plural cutting lines extending in a predetermined direction and a second group composed of second plural cutting lines formed perpendicular to the first plural cutting lines by injecting a water jet along the first plural cutting lines and the second plural cutting lines formed on the workpiece, comprising the steps of:
a first cutting step for repeating a first step for moving the water jet and the workpiece relative to each other from one end to the other end of a first cutting line of the first cutting lines formed on one side of the first group formed on the workpiece while the water jet is injected along the first cutting line, a second step for moving the water jet and the workpiece relative to each other from the other end of the first cutting line of the first cutting lines to the other end of a second cutting line adjacent to the first cutting line of the first cutting lines, a third step for moving the water jet and the workpiece relative to each other along the second cutting line of the first cutting lines, and a fourth step for moving the water jet and the workpiece relative to each other from one end of the second cutting line of the first cutting lines to one end of a third cutting line adjacent to the second cutting line of the first cutting lines, up to the last cutting line of the first cutting lines formed on the other side of the first group formed on the workpiece; and
a second cutting step for repeating a first step for moving the water jet and the workpiece relative to each other from one end to the other end of a first cutting line of the second cutting lines formed on one side of the second group formed on the workpiece while the workpiece which has undergone the first cutting step is supported by a support member having through-grooves corresponding to the cutting lines of the second group formed on workpiece and the water jet is injected along the first cutting line, a second step for moving the water jet and the workpiece relative to each other from the other end of the first cutting line to the other end of a second cutting line adjacent to the first cutting line of the second cutting lines, a third step for moving the water jet and the workpiece relative to each other from the other end to one end along the second cutting line of the second cutting lines, and a fourth step for moving the water jet and the workpiece relative to each other from one end of the second cutting line to one end of a third cutting line adjacent to the second cutting line of the second cutting lines, up to the last cutting line of the second group formed on the other side of the second group.