US 6,981,300 B2
Piezoelectric ink jet print head and fabrication method for a pressure chamber thereof
Chih-Chang Tsai, Kaohsiung (Taiwan); and Ming-Hsun Yang, Hsinchu (Taiwan)
Assigned to Nanodynamics Inc., Hsinchu (Taiwan)
Filed on Sep. 02, 2003, as Appl. No. 10/653,621.
Claims priority of application No. 91120855 A (TW), filed on Sep. 12, 2002.
Prior Publication US 2004/0051760 A1, Mar. 18, 2004
Int. Cl. H04R 17/00 (2006.01)
U.S. Cl. 29—25.35 2 Claims
OG exemplary drawing
 
1. A fabrication method for a piezoelectric ink jet head, comprising steps of:
providing a silicon substrate comprising at least one large-size opening;
filling the at least one large-size opening of the silicon substrate with a photoresist layer; and
performing photolithography or etching on the photoresist layer to form a plurality of isolated small-size trenches spaced apart from each other, in which each isolated small-size trench serves as a pressure chamber.