US 6,981,300 B2 | ||
Piezoelectric ink jet print head and fabrication method for a pressure chamber thereof | ||
Chih-Chang Tsai, Kaohsiung (Taiwan); and Ming-Hsun Yang, Hsinchu (Taiwan) | ||
Assigned to Nanodynamics Inc., Hsinchu (Taiwan) | ||
Filed on Sep. 02, 2003, as Appl. No. 10/653,621. | ||
Claims priority of application No. 91120855 A (TW), filed on Sep. 12, 2002. | ||
Prior Publication US 2004/0051760 A1, Mar. 18, 2004 | ||
Int. Cl. H04R 17/00 (2006.01) |
U.S. Cl. 29—25.35 | 2 Claims |
1. A fabrication method for a piezoelectric ink jet head, comprising steps of:
providing a silicon substrate comprising at least one large-size opening;
filling the at least one large-size opening of the silicon substrate with a photoresist layer; and
performing photolithography or etching on the photoresist layer to form a plurality of isolated small-size trenches spaced
apart from each other, in which each isolated small-size trench serves as a pressure chamber.
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