US 6,982,218 B2
Method of producing a semiconductor-metal contact through a dielectric layer
Ralf Preu, Freiburg (Germany); Eric Schneiderlöchner, Freiburg (Germany); Stefan Glunz, Freiburg (Germany); and Ralf Lüdeman, Freiburg (Germany)
Assigned to Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V., Munich (Germany)
Appl. No. 10/380,836
PCT Filed Aug. 30, 2001, PCT No. PCT/EP01/10029
§ 371(c)(1), (2), (4) Date Jul. 30, 2003,
PCT Pub. No. WO02/25742, PCT Pub. Date Mar. 28, 2002.
Claims priority of application No. 100 46 170 (DE), filed on Sep. 19, 2000.
Prior Publication US 2004/0097062 A1, May 20, 2004
Int. Cl. H01L 21/44 (2006.01)
U.S. Cl. 438—600 16 Claims
OG exemplary drawing
 
1. A method of electrically contacting a semiconductor layer coated with at least one dielectric layer, comprising:
applying a metal layer on the at least one dielectric layer and temporarily locally heating the metal layer in a line or at a plurality of sites in a linear pattern or a plurality of sites in a dotted pattern on the semiconductor layer by means of a controlled source of radiation providing radiation to produce a local molten mixture consisting exclusively of the metal layer, the dielectric layer and the semiconductor layer at the line or at the linear pattern or at the dotted pattern to provide an electrical contact with controlled contact electrical resistivity between the metal layer and the semiconductor layer with the dielectric layer and the semiconductor layer being located directly beneath the metal layer, which, upon solidification produces the electrical contact between the semiconductor layer and the metal layer of the controlled contact resistivity, and that both the surrounding dielectric layer and the semiconductor layer which are contacted are not changed by excessive heating during the local heating regarding the function thereof, beyond a region of the electrical contact.