US 6,982,182 B2 | ||
Moisture passivated planar index-guided VCSEL | ||
Seongsin Kim, San Jose, Calif. (US); Wilson H. Widjaja, Cupertin, Calif. (US); and Suning Xie, Santa Clara, Calif. (US) | ||
Assigned to Agilent Technologies, Inc., Palo Alto, Calif. (US) | ||
Filed on Jul. 14, 2003, as Appl. No. 10/620,137. | ||
Application 10/620137 is a division of application No. 10/013108, filed on Dec. 07, 2001, granted, now 6,680,964. | ||
Prior Publication US 2004/0004984 A1, Jan. 08, 2004 | ||
Int. Cl. H01L 21/00 (2006.01); H01S 5/00 (2006.01) |
U.S. Cl. 438—38 | 9 Claims |
1. A method of manufacturing a vertical cavity surface emitting laser (VCSEL), comprising:
forming a vertical stack structure having a substantially planar top surface, including
a top mirror,
a bottom mirror,
a cavity region disposed between the top mirror and the bottom mirror and including an active light generation region,
at least one of the top mirror and the bottom mirror having a layer with a peripheral region oxidized into an electrical insulator
as a result of exposure to an oxidizing agent, wherein the vertical stack structure defines two or more etched holes each
extending from the substantially planar top surface to the oxidized peripheral region; and
passivating each of the etched holes by an overlying moisture penetration barrier.
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