US 6,982,132 B1
Rechargeable thin film battery and method for making the same
Ronald B. Goldner, Lexington, Mass. (US); Te-Yang Liu, Arlington, Mass. (US); Mark A. Goldner, Boston, Mass. (US); Alexandra Gerouki, Medford, Mass. (US); and Terry E. Haas, Southborough, Mass. (US)
Assigned to Trustees of Tufts College, Medford, Mass. (US)
Filed on Aug. 14, 2000, as Appl. No. 9/638,444.
Application 09/638444 is a continuation in part of application No. 08/951085, filed on Oct. 15, 1997, abandoned.
Int. Cl. H01M 10/36 (2006.01); H01M 10/38 (2006.01); H01M 4/48 (2006.01); H01M 4/58 (2006.01); C23C 14/48 (2006.01)
U.S. Cl. 429—162 40 Claims
OG exemplary drawing
 
1. A rechargeable, stackable thin film electrochemical cell for a thin film, solid-state battery comprising:
a dense, non-porous, thin film, unannealed inorganic cathode comprised of a first reversible lithium insertion material, said cathode formed by irradiating a depositing cathode film with an ion source having an ion beam energy of less than 100 eV;
a dense, non-porous, thin film, inorganic anode comprised of a second reversible lithium insertion material;
said first and second insertion materials having intrinsically anisotropic crystallographic lithium ion diffusion directions;
a dense, non-porous, thin film, inorganic, solid-state electrolyte disposed between said cathode and said anode films, said electrolyte film forming a first and second interface respectively with said cathode and anode films;
a first crystallographic lithium ion diffusion direction of said first insertion material aligned in a predominately non-parallel orientation to said cathode-electrolyte interface; and
a second crystallographic lithium ion diffusion direction of said second insertion material aligned in a predominately non-parallel orientation to said anode-electrolyte interface.