US 6,982,419 B2
Probe with hollow waveguide and method for producing the same
Yasuhiro Shimada, Kanagawa (Japan); and Ryo Kuroda, Kanagawa (Japan)
Assigned to Canon Kabushiki Kaisha, Tokyo (Japan)
Filed on Apr. 11, 2005, as Appl. No. 11/102,662.
Application 11/102662 is a division of application No. 09/879905, filed on Jun. 14, 2001.
Claims priority of application No. 2000/180894 (JP), filed on Jun. 16, 2000.
Prior Publication US 2005/0247117 A1, Nov. 10, 2005
Int. Cl. H01J 40/14 (2006.01)
U.S. Cl. 250—307 10 Claims
OG exemplary drawing
 
1. A method for producing a probe comprising a tip having a microaperture and a cantilever, said method comprising the steps of:
working a first substrate to form a groove and a mirror in the groove,
forming a flat cover portion on the groove to form a hollow waveguide having an opening in a part thereof,
preparing a second substrate having a recess portion,
forming a layer to become a tip layer in the recess portion,
aligning the first substrate having the flat cover portion and the layer are in contact with each other,
detaching the second substrate from the first substrate to leave the tip layer on the first substrate,
forming a microaperture in said tip layer, and
removing a part of the first substrate by etching, to form a cantilever.