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US 6,982,005 B2 |
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Multiple-nozzle thermal evaporation source |
Erten Eser, Newark, Del. (US); and Gregory M. Hanket, Newark, Del. (US) |
Assigned to University of Delaware, Newark, Del. (US) |
Filed on May 09, 2003, as Appl. No. 10/435,637. |
Application 10/435637 is a division of application No. 10/234604, filed on Sep. 04, 2002, granted, now 6,562,405. |
Claims priority of provisional application 60/322039, filed on Sep. 14, 2001. |
Prior Publication US 2003/0209202 A1, Nov. 13, 2003 |
This patent is subject to a terminal disclaimer. |
Int. Cl. C23C 14/24 (2006.01)
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