US 6,982,058 B2 | ||
Method for fabricating three dimensional structures | ||
James D. Jacobson, Lindenhurst, Ill. (US) | ||
Assigned to Baxter International, Inc., Deerfield, Ill. (US) | ||
Filed on Jun. 12, 2002, as Appl. No. 10/167,890. | ||
Application 10/167890 is a continuation in part of application No. 09/457173, filed on Dec. 08, 1999. | ||
Prior Publication US 2002/0162791 A1, Nov. 07, 2002 | ||
Int. Cl. B01D 67/00 (2006.01) |
U.S. Cl. 264—400 | 52 Claims |
1. A method of manufacturing a three dimensional structure having at least a first layer and a second layer, said method comprising:
providing a substrate layer;
applying a first coating of a photoimageable material to the substrate layer;
preparing a first mask having a pattern corresponding to the first layer of the three dimensional structure to be manufactured;
exposing the first coating of the photoimageable material with an exposure source through the first mask such that the first
layer of the three dimensional structure is provided;
applying a second coating of the photoimageable material subsequent to the first layer of the three dimensional structure;
preparing a second mask having a pattern corresponding to the second layer of the three dimensional structure to be manufactured;
exposing the second coating of the photoimageable material with the exposure source through the second mask such that the
second layer of the three dimensional structure is provided; and
developing and removing regions of said first and second coatings that do not correspond to a layer of the three dimensional
structure.
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