US 6,982,797 B2
Apparatus for devices for determining properties of applied layers
Eckhard Wirth, Gelnhausen (Germany)
Assigned to Leybold Optics GmbH, Alzenau (Germany)
Filed on Jan. 20, 2003, as Appl. No. 10/347,715.
Claims priority of application No. 102 04 075 (DE), filed on Feb. 01, 2002.
Prior Publication US 2003/0147084 A1, Aug. 07, 2003
Int. Cl. G01B 11/06 (2006.01)
U.S. Cl. 356—630 15 Claims
OG exemplary drawing
 
1. Apparatus for devices for determining properties of applied layers, comprising:
a rotatable test glass magazine with at least two discrete test glasses;
a rotatable crystal resonator magazine with at least two crystal resonators,
with one magazine being disposed within the other magazine.