US 6,982,125 B2 | ||
ALN material and electrostatic chuck incorporating same | ||
Brian C. LaCourse, Pepperell, Mass. (US); Morteza Zandi, Shrewsbury, Mass. (US); and Ara Vartabedian, Hudson, Mass. (US) | ||
Assigned to Saint-Gobain Ceramics & Plastics, Inc., Worcester, Mass. (US) | ||
Filed on Dec. 23, 2002, as Appl. No. 10/327,722. | ||
Prior Publication US 2004/0121192 A1, Jun. 24, 2004 | ||
Int. Cl. C05B 35/00 (2006.01); B32B 18/00 (2006.01); B23B 5/22 (2006.01); B23B 31/28 (2006.01) |
U.S. Cl. 428—698 | 18 Claims |
1. An electrostatic chuck, comprising:
a ceramic body comprising AlN and at least one additive for reducing restivity of the AlN, the additive comprising rare earth
oxide;
and at least one electrode in the ceramic body, wherein
the AlN has a resistivity ratio ρ10V/ρ500V less than 3, and has an average resistivity of not greater than 1E11 ohm-cm over an operating temperature range of the electrostatic
chuck, the operating temperature range extending up to a temperature of not greater than 150° C.
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