US 6,982,783 B2 | ||
Chucking system for modulating shapes of substrates | ||
Byung J. Choi, Round Rock, Tex. (US); Ronald D. Voisin, Austin, Tex. (US); Sidlgata V. Sreenivasan, Austin, Tex. (US); Michael P. C. Watts, Austin, Tex. (US); Daniel Babbs, Austin, Tex. (US); Mario J. Meissl, Austin, Tex. (US); Hillman Bailey, Dripping Springs, Tex. (US); and Norman E. Schumaker, Austin, Tex. (US) | ||
Assigned to Molecular Imprints, Inc., Austin, Tex. (US) | ||
Filed on Jun. 09, 2004, as Appl. No. 10/864,591. | ||
Application 10/864591 is a continuation of application No. 10/293224, filed on Nov. 13, 2002. | ||
Prior Publication US 2004/0223131 A1, Nov. 11, 2004 | ||
Int. Cl. G03B 27/58 (2006.01); G03B 27/42 (2006.01) |
U.S. Cl. 355—72 | 20 Claims |
1. A chucking system to hold a substrate, said chucking system comprising:
a chuck body having a side with a pair of spaced-apart support regions extending therefrom terminating in a plane, said pair
of spaced-apart support regions having a recess defined therebetween, with a portion of said chuck body in superimposition
with said recess being transparent to radiation having a predetermined wavelength, with said chuck body being defined between
said side and said plane.
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