US 6,982,797 B2 | ||
Apparatus for devices for determining properties of applied layers | ||
Eckhard Wirth, Gelnhausen (Germany) | ||
Assigned to Leybold Optics GmbH, Alzenau (Germany) | ||
Filed on Jan. 20, 2003, as Appl. No. 10/347,715. | ||
Claims priority of application No. 102 04 075 (DE), filed on Feb. 01, 2002. | ||
Prior Publication US 2003/0147084 A1, Aug. 07, 2003 | ||
Int. Cl. G01B 11/06 (2006.01) |
U.S. Cl. 356—630 | 15 Claims |
1. Apparatus for devices for determining properties of applied layers, comprising:
a rotatable test glass magazine with at least two discrete test glasses;
a rotatable crystal resonator magazine with at least two crystal resonators,
with one magazine being disposed within the other magazine.
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