US 7,321,299 B2
Workpiece handling alignment system
Kevin R. Verrier, Hampton, N.H. (US); David K. Bernhardt, Hudson, Mass. (US); Jerry F. Negrotti, Beverly, Mass. (US); and Donald N. Polner, Marblehead, Mass. (US)
Assigned to Axcelis Technologies, Inc., Beverly, Mass. (US)
Filed on Jun. 08, 2005, as Appl. No. 11/147,973.
Prior Publication US 2007/0008105 A1, Jan. 11, 2007
Int. Cl. G08B 19/00 (2006.01)
U.S. Cl. 340—521  [340/679; 340/680; 340/686.1; 340/686.2; 340/686.4; 340/686.5] 29 Claims
OG exemplary drawing
 
1. Apparatus for calibrating workpiece handling equipment for use with a workpiece treatment system comprising:
a) a support that supports a workpiece in a treatment region during workpiece processing;
b) a housing that provides a controlled environment within a housing interior for processing one or more workpieces on the support;
c) transfer structure for moving a workpiece into and out of said housing; and
d) an alignment sensor for monitoring the workpieces within the housing and determining proper alignment of at least one of said workpiece support and transfer structure comprising a substrate having dimensions that approximate workpieces for movement into and out of said housing and a contact sensor mounted to the substrate for monitoring contact between the substrate and workpiece handling or support structure.