US 7,321,680 B2
Graphic contour extracting method, pattern inspecting method, program and pattern inspecting system
Takahiro Ikeda, Kanagawa (Japan); and Yumiko Miyano, Kanagawa (Japan)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (Japan)
Filed on Mar. 24, 2004, as Appl. No. 10/807,188.
Application 10/807188 is a division of application No. 10/188889, filed on Jul. 05, 2002, granted, now 6,772,089.
Claims priority of application No. 2001-204478 (JP), filed on Jul. 05, 2001.
Prior Publication US 2004/0181361 A1, Sep. 16, 2004
Int. Cl. G06K 9/36 (2006.01); G06K 9/48 (2006.01); G06F 19/00 (2006.01)
U.S. Cl. 382—145  [382/241; 382/199; 700/187] 8 Claims
OG exemplary drawing
 
1. A graphic contour extracting method comprising:
acquiring an image of a graphical form to be inspected;
defining a potential function V for the image of the graphical form;
calculating a first group of curves which are formed by connecting equal values with respect to values expressed by said potential function V;
calculating a second group of curves which are substantially perpendicular to said first group of curves; and
searching a contour of the graphical form along said second group of curves to acquire contour information of the graphical form.