US 7,320,250 B2 | ||
Pressure sensing element and sensor incorporating the same | ||
Masato Ueno, Anjo (Japan) | ||
Assigned to DENSO CORPORATION, Kariya (Japan) | ||
Filed on Jan. 19, 2006, as Appl. No. 11/334,461. | ||
Claims priority of application No. 2005-038893 (JP), filed on Feb. 16, 2005. | ||
Prior Publication US 2006/0179953 A1, Aug. 17, 2006 | ||
Int. Cl. G01L 9/00 (2006.01) |
U.S. Cl. 73—754 [73/715; 73/753] | 30 Claims |
1. A sensing element comprising:
a substrate having a stress-accepting portion and a joint portion; and
a structure formed between the stress-accepting portion and the joint portion for restraining stress in the substrate, wherein
the stress-accepting portion includes a diaphragm and a thick part, the thick part being disposed on a periphery of the diaphragm,
and the structure being disposed in the thick part,
the structure comprises a groove formed in a surface of the substrate where the joint portion is located, and
the joint portion surrounds the stress-accepting portion, and the groove is located between the joint portion and the stress-accepting
portion to surround the stress-accepting portion.
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