US 7,321,652 B2
Multi-detector EDXRD
Boris Yokhin, Nazareth Illit (Israel); Alexander Krokhmal, Haifa (Israel); and Alex Tokar, Haifa (Israel)
Assigned to Jordan Valley Semiconductors Ltd., Migdal Ha'emek (Israel)
Filed on Sep. 15, 2006, as Appl. No. 11/532,162.
Claims priority of provisional application 60/717820, filed on Sep. 15, 2005.
Prior Publication US 2007/0058779 A1, Mar. 15, 2007
Int. Cl. G01T 1/36 (2006.01)
U.S. Cl. 378—82  [378/83] 16 Claims
OG exemplary drawing
 
1. A method for analysis of a sample, comprising:
irradiating an area of the sample with a polychromatic X-ray beam;
detecting X-rays scattered from the sample using a plurality of detectors simultaneously in different, respective positions, whereby the detectors generate respective outputs;
applying energy-dispersive processing to the outputs of the detectors so as to identify one or more X-ray diffraction lines of the sample; and
using the one or more X-ray diffraction lines to determine a crystalline structure of the sample.