US 7,321,430 B2 | ||
Vibration resistant interferometry | ||
Leslie L. Deck, Middletown, Conn. (US) | ||
Assigned to Zygo Corporation, Middlefield, Conn. (US) | ||
Filed on Apr. 22, 2005, as Appl. No. 11/112,332. | ||
Claims priority of provisional application 60/564477, filed on Apr. 22, 2004. | ||
Claims priority of application No. 94112683 A (TW), filed on Apr. 21, 2005. | ||
Prior Publication US 2005/0237535 A1, Oct. 27, 2005 | ||
This patent is subject to a terminal disclaimer. | ||
Int. Cl. G01B 11/02 (2006.01) |
U.S. Cl. 356—497 [356/495] | 26 Claims |
1. A method comprising:
providing scanning interferometry data for a test object, the data comprising an intensity value corresponding to each of
different spatial locations of the test object for each of multiple scan positions;
determining information related to the spatial locations of the test object based on the scanning interferometry data; and
determining a scan value for one of the multiple scan positions based on a relationship between the intensities of that scan
position and the information related to the spatial locations to which the intensities of that scan position correspond, including
determining a phase of a frequency of an oscillation of the intensities of the scan position with respect to the information
related to the spatial locations to which the intensities of the scan position correspond.
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