US 7,321,607 B2
External optics and chamber support system
David DiSorbo, La Mesa, Calif. (US)
Assigned to Cymer, Inc., San Diego, Calif. (US)
Filed on Dec. 15, 2005, as Appl. No. 11/304,118.
Claims priority of provisional application 60/732690, filed on Nov. 01, 2005.
Prior Publication US 2007/0098033 A1, May 03, 2007
Int. Cl. H01S 3/22 (2006.01)
U.S. Cl. 372—55  [372/57] 18 Claims
OG exemplary drawing
 
1. A gas discharge laser comprising:
a gas discharge laser chamber support structure comprising a first support arm attached to a mounting table;
a gas discharge laser chamber slideably engaging the first support arm;
a first optical element sensitive to chamber vibration positioned at a first end of the laser chamber mounted on the mounting table;
the laser chamber support structure being without connection to the first optical element.