US 7,321,993 B1 | ||
Method and apparatus for fault detection classification of multiple tools based upon external data | ||
Richard J. Markle, Austin, Tex. (US); and Elfido Coss, Jr., Austin, Tex. (US) | ||
Assigned to Advanced Micro Devices, Inc., Austin, Tex. (US) | ||
Filed on Jul. 01, 2004, as Appl. No. 10/883,364. | ||
Int. Cl. G06F 11/00 (2006.01) |
U.S. Cl. 714—47 [714/48] | 55 Claims |
1. A method, comprising:
monitoring each of a plurality of tools to determine if a fault condition occurs in any of said tools, each of said tools
being comprised of at least one integrated metrology device;
monitoring external data regarding at least one parameter that may impact an operation performed in each of said tools; and
determining if an indicated fault condition in at least one of said tools is a valid fault condition or a systemic fault condition
associated with a change in a value of said at least one parameter.
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