US 7,321,299 B2 | ||
Workpiece handling alignment system | ||
Kevin R. Verrier, Hampton, N.H. (US); David K. Bernhardt, Hudson, Mass. (US); Jerry F. Negrotti, Beverly, Mass. (US); and Donald N. Polner, Marblehead, Mass. (US) | ||
Assigned to Axcelis Technologies, Inc., Beverly, Mass. (US) | ||
Filed on Jun. 08, 2005, as Appl. No. 11/147,973. | ||
Prior Publication US 2007/0008105 A1, Jan. 11, 2007 | ||
Int. Cl. G08B 19/00 (2006.01) |
U.S. Cl. 340—521 [340/679; 340/680; 340/686.1; 340/686.2; 340/686.4; 340/686.5] | 29 Claims |
1. Apparatus for calibrating workpiece handling equipment for use with a workpiece treatment system comprising:
a) a support that supports a workpiece in a treatment region during workpiece processing;
b) a housing that provides a controlled environment within a housing interior for processing one or more workpieces on the
support;
c) transfer structure for moving a workpiece into and out of said housing; and
d) an alignment sensor for monitoring the workpieces within the housing and determining proper alignment of at least one of
said workpiece support and transfer structure comprising a substrate having dimensions that approximate workpieces for movement
into and out of said housing and a contact sensor mounted to the substrate for monitoring contact between the substrate and
workpiece handling or support structure.
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