US 7,321,993 B1
Method and apparatus for fault detection classification of multiple tools based upon external data
Richard J. Markle, Austin, Tex. (US); and Elfido Coss, Jr., Austin, Tex. (US)
Assigned to Advanced Micro Devices, Inc., Austin, Tex. (US)
Filed on Jul. 01, 2004, as Appl. No. 10/883,364.
Int. Cl. G06F 11/00 (2006.01)
U.S. Cl. 714—47  [714/48] 55 Claims
OG exemplary drawing
 
1. A method, comprising:
monitoring each of a plurality of tools to determine if a fault condition occurs in any of said tools, each of said tools being comprised of at least one integrated metrology device;
monitoring external data regarding at least one parameter that may impact an operation performed in each of said tools; and
determining if an indicated fault condition in at least one of said tools is a valid fault condition or a systemic fault condition associated with a change in a value of said at least one parameter.