US 7,321,126 B2
Collector with fastening devices for fastening mirror shells
Wolfgang Singer, Aalen (Germany); Wilhelm Egle, Aalen (Germany); Markus Weiss, Aalen (Germany); Joachim Hainz, Aalen (Germany); Joachim Wietzorrek, Aalen (Germany); Johannes Wangler, Königsbronn (Germany); Frank Melzer, Utzmemmingen (Germany); Bernhard Gellrich, Aalen (Germany); Bernhard Geuppert, Aalen (Germany); Erich Schubert, Jestetten (Germany); and Martin Antoni, Aalen (Germany)
Assigned to Carl Zeiss SMT AG, Oberkochen (Germany)
Filed on May 02, 2006, as Appl. No. 11/416,447.
Application 11/416447 is a continuation of application No. 10/775037, filed on Feb. 09, 2004, granted, now 7,091,505.
Application 10/775037 is a continuation in part of application No. PCT/EP02/08193, filed on Jul. 23, 2002.
Claims priority of application No. 101 38 313 (DE), filed on Aug. 10, 2001; and application No. PCT/EP02/00608 (WO), filed on Jan. 23, 2002.
Prior Publication US 2006/0291062 A1, Dec. 28, 2006
Int. Cl. A61N 5/00 (2006.01)
U.S. Cl. 250—492.2  [250/492.1; 378/34; 378/145; 378/147] 10 Claims
OG exemplary drawing
 
1. A collector, comprising:
a first mirror shell; and
a second mirror shell within said first mirror shell,
wherein said first and second mirror shells have a common rotational axis,
wherein said first mirror shell and said second mirror shell are fastened by a fastening device having a support spoke, and
wherein said support spoke is of a material having a thermal expansion coefficient that provides a substantially rotational symmetric expansion of said first mirror shell and said second mirror shell under a thermal load.