US 7,321,654 B2
Narrow band x-ray system and fabrication method thereof
Yong Min Cho, Silver Spring, Md. (US); and Daesoo Han, Sandy Spring, Md. (US)
Assigned to Mentor Technologies, Inc., Lanham, Md. (US)
Filed on Jun. 02, 2004, as Appl. No. 10/857,927.
Claims priority of provisional application 60/651460, filed on Jun. 03, 2003.
Prior Publication US 2005/0281384 A1, Dec. 22, 2005
Int. Cl. G21K 3/00 (2006.01)
U.S. Cl. 378—158  [378/156; 378/157] 24 Claims
OG exemplary drawing
 
1. A narrow band x-ray filter comprising:
a substrate; and
a sheaf of one or more reflection units stacked upon each other on the substrate, each reflection unit including
a first set of at least two discrete spacers on a respective underlying structure,
a reflector disposed on the first set of spacers so as to form a void between the respective underlying structure and the reflector, and
a first set of at least two discrete shims disposed on the first set of at least two spacers, each shim being at least substantially the same thickness as the reflector.