US 7,320,733 B2 | ||
Electron bombardment heating apparatus and temperature controlling apparatus and control method thereof | ||
Shigetaka Haga, Ibaraki-ken (Japan) | ||
Assigned to Sukegawa Electric Co., Ltd., Takahagi-shi, Ibaraki-ken (Japan) | ||
Filed on Apr. 08, 2004, as Appl. No. 10/821,081. | ||
Claims priority of application No. 2003-131322 (JP), filed on May 09, 2003; and application No. 2003-150265 (JP), filed on May 28, 2003. | ||
Prior Publication US 2004/0222199 A1, Nov. 11, 2004 | ||
Int. Cl. H01L 21/00 (2006.01) |
U.S. Cl. 118—725 [156/345.52; 156/345.53; 250/427] | 6 Claims |
1. An electron bombardment heating apparatus for heating a material, comprising:
a filament for emitting thermions therefrom;
means for accelerating the thermions emitted from the filament towards a heating plate;
a heating plate which is heated by bombardment of the accelerated thermions and serves as a means for supporting the material
to be heated; and
a supporting member having the heating plate provided at a top portion thereof, vertically disposed cylindrical peripheral
wall portions which have a different diameter from each other and a horizontally disposed annular wall portion which extends
in a radial direction and connects the vertically disposed cylindrical peripheral wall portions with each other.
|