US 7,321,431 B2 | ||
Method and system for analyzing low-coherence interferometry signals for information about thin film structures | ||
Peter De Groot, Middletown, Conn. (US) | ||
Assigned to Zygo Corporation, Middlefield, Conn. (US) | ||
Filed on May 18, 2006, as Appl. No. 11/437,002. | ||
Claims priority of provisional application 60/682742, filed on May 19, 2005. | ||
Prior Publication US 2006/0262321 A1, Nov. 23, 2006 | ||
Int. Cl. G01B 11/06 (2006.01) |
U.S. Cl. 356—497 [356/504; 356/511] | 46 Claims |
1. A method comprising:
providing a scanning interferometry signal produced by a scanning interferometer for a first location of a test object;
providing a model function of the scanning interferometry signal produced by the scanning interferometer, wherein the model
function is parametrized by one or more parameter values;
fitting the model function to the scanning interferometry signal for each of a series of shifts in scan position between the
model function and the scanning interferometry signal by varying the parameter values; and
determining information about the test object at the first location based on the fitting.
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