US 7,321,156 B2
Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device
Frank Fischer, Gomaringen (Germany); Hans-Peter Trah, Stuttgart (Germany); Franz Laermer, Weil Der Stadt (Germany); and Lars Metzger, Moessingen-Belson (Germany)
Assigned to Robert Bosch GmbH, Stuttgart (Germany)
Filed on Jul. 22, 2004, as Appl. No. 10/897,449.
Claims priority of application No. 103 33 960 (DE), filed on Jul. 25, 2003.
Prior Publication US 2005/0029607 A1, Feb. 10, 2005
Int. Cl. H01L 29/82 (2006.01)
U.S. Cl. 257—417  [257/254; 257/414] 6 Claims
OG exemplary drawing
 
1. A device for capacitive pressure measurement, comprising:
an insulated base electrode;
a mechanically deflectable counterelectrode including a layer made of at least one of (a) a monocrystalline semiconductor material and (b) a polycrystalline semiconductor material;
a contact arrangement configured to electrically connect the electrode and the counterelectrode; and
at least one semiconductor component;
wherein the base electrode, the counterelectrode, the contact arrangement and the semiconductor component are integrated onto a semiconductor substrate; and
wherein a connection of the contact arrangement of the base electrode to a metal plating includes a dielectrically insulated conductive polycrystalline semiconductor layer.