US 7,321,108 B2 | ||
Dynamic focusing method and apparatus | ||
Cory Watkins, Eden Prairie, Minn. (US); Mark Harless, Plymouth, Minn. (US); David Vaughnn, Edina, Minn. (US); Pat Simpkins, Edina, Minn. (US); Shaileshkumar Goyal, Rajasthan (India); Gerald Brown, Plano, Tex. (US); and Brian Delsey, Frisco, Tex. (US) | ||
Assigned to Rudolph Technology, Inc., Flanders, N.J. (US) | ||
Filed on Jan. 22, 2007, as Appl. No. 11/625,640. | ||
Application 11/625640 is a division of application No. 11/179047, filed on Jul. 11, 2005, granted, now 7,196,300. | ||
Application 11/179047 is a continuation in part of application No. 10/622848, filed on Jul. 18, 2003, granted, now 7,170,075. | ||
Claims priority of provisional application 60/587570, filed on Jul. 12, 2004. | ||
Claims priority of provisional application 60/587302, filed on Jul. 12, 2004. | ||
Claims priority of provisional application 60/587216, filed on Jul. 12, 2004. | ||
Prior Publication US 2007/0114358 A1, May 24, 2007 | ||
Int. Cl. G02B 7/04 (2006.01); G02B 27/40 (2006.01); G02B 21/36 (2006.01); G01N 21/00 (2006.01) |
U.S. Cl. 250—201.2 [250/201.3; 250/201.4; 250/559.05; 250/559.07; 250/559.08; 250/559.29; 356/601; 356/609; 356/614; 356/624; 359/368; 359/379; 359/380; 359/678; 359/694; 359/698; 359/823; 359/432] | 21 Claims |
1. An imaging mechanism for capturing images of a moving surface having a
variable geometry comprising:
a camera for capturing images;
a focusing assembly that defines an optical path between the moving surface and the camera, the focusing assembly including
a prism adapted for substantially parallel movement toward and away from the moving surface, the distance between the prism
and the moving surface being related to the depth of focus of the focusing assembly; and
an illuminator for illuminating the moving surface.
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