US 7,320,339 B2
Gas-panel assembly
Matthew L. Milburn, Felton, Calif. (US)
Assigned to Ultra Clean Holdings, Inc., Menlo Park, Calif. (US)
Filed on Sep. 01, 2005, as Appl. No. 11/219,105.
Claims priority of provisional application 60/687018, filed on Jun. 02, 2005.
Prior Publication US 2006/0272721 A1, Dec. 07, 2006
Int. Cl. F16K 11/10 (2006.01)
U.S. Cl. 137—884 14 Claims
OG exemplary drawing
 
1. For use in a gas-panel assembly having two or more gas-panel sticks mounted on a support, where each stick is composed of a manifold, a plurality of gas components mounted on the manifold, and internal fluid connections in the manifold between individual components carried on each manifold, modular components for providing fluid connections between adjacent sticks, comprising
(a) one or more modular blocks adapted to be removably placed adjacent an end of or within each manifold, each modular block providing at least one support region, wherein each modular block is composed of a pair of confronting block modules, where each block module provides:
(i) at least one groove formed therein, such that when two block modules are placed together, confronting grooves in the two modules form an opening in which a connector in an internal pipe module can be received,
(ii) an upper surface region adjacent each groove, such when two block modules are placed together, confronting surface regions define a support region for supporting the collar of a pipe module having a connector received in said opening,
(b) means defining an internal passageway adapted to provide a below-surface fluid passageway between a selected gas component carried on a manifold and said support region in an adjacent modular block, thereby to form a surface port in said modular block, wherein said passageway-defining means includes an internal pipe module adapted to be supported at one end by said modular block and at its other end by a portion of said manifold adjacent said block, and each internal pipe module is composed of two or more connectors joined in fluid-communication by a pipe section, and at least one of the connectors terminates in a collar adapted to be supported within a modular block, and
(c) an external pipe module adapted to provide an above-surface fluid passageway between surface ports formed in said modular blocks associated with adjacent manifolds in the gas assembly.