US 7,321,129 B2 | ||
Deposition system and film thickness monitoring device thereof | ||
Shing-Dar Tang, Taoyuan Hsien (Taiwan); and Sean Chang, Taoyuan Hsien (Taiwan) | ||
Assigned to Delta Electronics, Inc., Kuei San, Taoyuan Hsien (Taiwan) | ||
Filed on Jul. 27, 2005, as Appl. No. 11/189,868. | ||
Claims priority of application No. 93122864 A (TW), filed on Jul. 30, 2004. | ||
Prior Publication US 2006/0033057 A1, Feb. 16, 2006 | ||
Int. Cl. G01N 21/86 (2006.01) |
U.S. Cl. 250—559.27 | 19 Claims |
1. A device for monitoring thickness of a thin film coated on an optical substrate, comprising:
at least one light source emitting a light beam passing through the thin film along a first path;
at least one retro-reflector for reflecting the light beam such that the light beam passes through the thin film along a second
path parallel to the first path;
at least one light receiver for receiving the light beam passing through the thin film along the second light path; and
a clamping mechanism rotating at a constant speed for disposing the optical substrate thereon, wherein, when the thin film
is rotated to be in the first path, the light beam of the light source passes through the thin film.
|