US 7,320,339 B2 | ||
Gas-panel assembly | ||
Matthew L. Milburn, Felton, Calif. (US) | ||
Assigned to Ultra Clean Holdings, Inc., Menlo Park, Calif. (US) | ||
Filed on Sep. 01, 2005, as Appl. No. 11/219,105. | ||
Claims priority of provisional application 60/687018, filed on Jun. 02, 2005. | ||
Prior Publication US 2006/0272721 A1, Dec. 07, 2006 | ||
Int. Cl. F16K 11/10 (2006.01) |
U.S. Cl. 137—884 | 14 Claims |
1. For use in a gas-panel assembly having two or more gas-panel sticks mounted on a support, where each stick is composed
of a manifold, a plurality of gas components mounted on the manifold, and internal fluid connections in the manifold between
individual components carried on each manifold, modular components for providing fluid connections between adjacent sticks,
comprising
(a) one or more modular blocks adapted to be removably placed adjacent an end of or within each manifold, each modular block
providing at least one support region, wherein each modular block is composed of a pair of confronting block modules, where
each block module provides:
(i) at least one groove formed therein, such that when two block modules are placed together, confronting grooves in the two
modules form an opening in which a connector in an internal pipe module can be received,
(ii) an upper surface region adjacent each groove, such when two block modules are placed together, confronting surface regions
define a support region for supporting the collar of a pipe module having a connector received in said opening,
(b) means defining an internal passageway adapted to provide a below-surface fluid passageway between a selected gas component
carried on a manifold and said support region in an adjacent modular block, thereby to form a surface port in said modular
block, wherein said passageway-defining means includes an internal pipe module adapted to be supported at one end by said
modular block and at its other end by a portion of said manifold adjacent said block, and each internal pipe module is composed
of two or more connectors joined in fluid-communication by a pipe section, and at least one of the connectors terminates in
a collar adapted to be supported within a modular block, and
(c) an external pipe module adapted to provide an above-surface fluid passageway between surface ports formed in said modular
blocks associated with adjacent manifolds in the gas assembly.
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