US 7,321,607 B2 | ||
External optics and chamber support system | ||
David DiSorbo, La Mesa, Calif. (US) | ||
Assigned to Cymer, Inc., San Diego, Calif. (US) | ||
Filed on Dec. 15, 2005, as Appl. No. 11/304,118. | ||
Claims priority of provisional application 60/732690, filed on Nov. 01, 2005. | ||
Prior Publication US 2007/0098033 A1, May 03, 2007 | ||
Int. Cl. H01S 3/22 (2006.01) |
U.S. Cl. 372—55 [372/57] | 18 Claims |
1. A gas discharge laser comprising:
a gas discharge laser chamber support structure comprising a first support arm attached to a mounting table;
a gas discharge laser chamber slideably engaging the first support arm;
a first optical element sensitive to chamber vibration positioned at a first end of the laser chamber mounted on the mounting
table;
the laser chamber support structure being without connection to the first optical element.
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