US 7,321,430 B2
Vibration resistant interferometry
Leslie L. Deck, Middletown, Conn. (US)
Assigned to Zygo Corporation, Middlefield, Conn. (US)
Filed on Apr. 22, 2005, as Appl. No. 11/112,332.
Claims priority of provisional application 60/564477, filed on Apr. 22, 2004.
Claims priority of application No. 94112683 A (TW), filed on Apr. 21, 2005.
Prior Publication US 2005/0237535 A1, Oct. 27, 2005
This patent is subject to a terminal disclaimer.
Int. Cl. G01B 11/02 (2006.01)
U.S. Cl. 356—497  [356/495] 26 Claims
OG exemplary drawing
 
1. A method comprising:
providing scanning interferometry data for a test object, the data comprising an intensity value corresponding to each of different spatial locations of the test object for each of multiple scan positions;
determining information related to the spatial locations of the test object based on the scanning interferometry data; and
determining a scan value for one of the multiple scan positions based on a relationship between the intensities of that scan position and the information related to the spatial locations to which the intensities of that scan position correspond, including determining a phase of a frequency of an oscillation of the intensities of the scan position with respect to the information related to the spatial locations to which the intensities of the scan position correspond.