US 7,321,217 B2
Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor
Sri M. Sri-Jayantha, Ossining, N.Y. (US); Hien Dang, Nanuet, N.Y. (US); Arun Sharma, New Rochelle, N.Y. (US); Evangelos S. Eleftheriou, Zurich (Switzerland); Mark A. Lantz, Zurich (Switzerland); and Charalampos Pozidis, Gattikon (Switzerland)
Assigned to International Business Machines Corporation, Armonk, N.Y. (US)
Filed on Sep. 06, 2006, as Appl. No. 11/515,910.
Application 11/515910 is a continuation of application No. 10/411136, filed on Apr. 11, 2003, granted, now 7,119,511.
Prior Publication US 2007/0069679 A1, Mar. 29, 2007
Int. Cl. G05B 1/06 (2006.01)
U.S. Cl. 318—638 6 Claims
OG exemplary drawing
 
1. A servo control system for a micro-electromechanical system (MEMS)-based motion control system, comprising:
a motion generator having an inherent stiffness component;
means for generating a counter balancing term to said inherent stiffness component;
a node coupled to receive an input from said means for generating a counter balancing term; and
a servo controller for receiving a position error signal based on a target position first-axis reference signal, and a reference velocity,
wherein the stiffness term is fed forward without waiting for the servo controller to build up
wherein said means for generating comprises:
a look up table for a condition when the stiffness comprises a complex function of position.