US 7,320,733 B2
Electron bombardment heating apparatus and temperature controlling apparatus and control method thereof
Shigetaka Haga, Ibaraki-ken (Japan)
Assigned to Sukegawa Electric Co., Ltd., Takahagi-shi, Ibaraki-ken (Japan)
Filed on Apr. 08, 2004, as Appl. No. 10/821,081.
Claims priority of application No. 2003-131322 (JP), filed on May 09, 2003; and application No. 2003-150265 (JP), filed on May 28, 2003.
Prior Publication US 2004/0222199 A1, Nov. 11, 2004
Int. Cl. H01L 21/00 (2006.01)
U.S. Cl. 118—725  [156/345.52; 156/345.53; 250/427] 6 Claims
OG exemplary drawing
 
1. An electron bombardment heating apparatus for heating a material, comprising:
a filament for emitting thermions therefrom;
means for accelerating the thermions emitted from the filament towards a heating plate;
a heating plate which is heated by bombardment of the accelerated thermions and serves as a means for supporting the material to be heated; and
a supporting member having the heating plate provided at a top portion thereof, vertically disposed cylindrical peripheral wall portions which have a different diameter from each other and a horizontally disposed annular wall portion which extends in a radial direction and connects the vertically disposed cylindrical peripheral wall portions with each other.