US 7,321,180 B2 | ||
Piezoelectric/electrostrictive device | ||
Yukihisa Takeuchi, Nishikamo-Gun (Japan); Tsutomu Nanataki, Toyoake (Japan); Koji Ikeda, Hisai (Japan); Koji Kimura, Nagoya (Japan); and Kazuyoshi Shibata, Mizunami (Japan) | ||
Assigned to NGK Insulators, Ltd., Nagoya (Japan) | ||
Filed on Oct. 06, 2004, as Appl. No. 10/959,420. | ||
Application 10/067958 is a division of application No. 09/671669, filed on Sep. 27, 2000, granted, now 6,534,898. | ||
Application 10/959420 is a continuation of application No. 10/448984, filed on May 30, 2003, abandoned. | ||
Application 10/448984 is a continuation of application No. 10/246032, filed on Sep. 18, 2002, granted, now 6,605,887. | ||
Application 10/246032 is a continuation of application No. 10/067958, filed on Feb. 05, 2002, granted, now 6,476,538. | ||
Application 09/671669 is a continuation of application No. 09/524042, filed on Mar. 13, 2000, granted, now 6,498,419. | ||
Claims priority of provisional application 60/210246, filed on Jun. 08, 2000. | ||
Claims priority of application No. 11-281522 (JP), filed on Oct. 01, 1999; application No. 11-307844 (JP), filed on Oct. 28, 1999; application No. 11-326195 (JP), filed on Nov. 16, 1999; application No. 11-371967 (JP), filed on Dec. 27, 1999; application No. 2000-013576 (JP), filed on Jan. 21, 2000; application No. 2000-015123 (JP), filed on Jan. 24, 2000; application No. 2000-056434 (JP), filed on Mar. 01, 2000; and application No. 2000-169584 (JP), filed on Jun. 06, 2000. | ||
Prior Publication US 2005/0168109 A1, Aug. 04, 2005 | ||
Int. Cl. H02N 2/00 (2006.01) |
U.S. Cl. 310—320 [310/328] | 14 Claims |
1. A piezoelectric/electrostrictive device comprising:
a pair of mutually opposing thin plate sections;
a fixation section for supporting said thin plate sections;
movable sections comprising at least first end portions of said pair of thin plate sections; and
one or more piezoelectric/electrostrictive elements arranged on at least one thin plate section of said pair of thin plate
sections;
wherein said movable sections further comprise another material which is different from the material of said thin plate sections.
|