US 7,321,118 B2 | ||
Scanning transmission ion microscope | ||
Billy W. Ward, Merrimac, Mass. (US) | ||
Assigned to ALIS Corporation, Peabody, Mass. (US) | ||
Filed on Jun. 07, 2005, as Appl. No. 11/147,102. | ||
Prior Publication US 2006/0284092 A1, Dec. 21, 2006 | ||
Int. Cl. H01J 37/30 (2006.01) |
U.S. Cl. 250—309 [250/310; 250/306] | 20 Claims |
1. Scanning transmission ion microscope comprising:
a bright helium ion source to generate an ion beam;
a focusing electrostatic optical column to focus the ion beam;
a translation stage supporting a sample to receive the focused ion beam; and
a detector responsive to ions transmitted through the sample.
|