US 7,321,232 B2
Charge amount measurement method, shift value measurement method of charged beam, charge amount measuring device and shift value measuring device of charged beam
Masakazu Hayashi, Yokohama (Japan)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (Japan)
Filed on Feb. 07, 2006, as Appl. No. 11/348,246.
Application 11/348246 is a division of application No. 10/890241, filed on Jul. 14, 2004, granted, now 7,009,411.
Application 10/890241 is a division of application No. 10/200503, filed on Jul. 23, 2002, abandoned.
Claims priority of application No. 2001-222439 (JP), filed on Jul. 24, 2001.
Prior Publication US 2006/0125495 A1, Jun. 15, 2006
Int. Cl. G01R 31/305 (2006.01); H01J 37/28 (2006.01)
U.S. Cl. 324—751  [250/306; 250/310; 324/750] 2 Claims
OG exemplary drawing
 
1. A charge amount measurement method comprising:
interposing a measurement subject between a first substance and a second substance having a through hole;
measuring a first collision position where a charged beam passed through the through hole and vicinity of the measurement subject collides against the first substance, in a state that there is no potential difference between the first substance and the second substance;
measuring a second collision position where a charged beam passed through the through hole and vicinity of the measurement subject collides against the first substance, in a state that there is a potential difference between the first substance and the second substance; and
measuring a charge amount of the measurement subject based on a difference between the measured first collision position and the measured second collision position.