US 7,320,455 B2
Instrumented platform for vibration-sensitive equipment
Vyacheslav M. Ryaboy, Irvine, Calif. (US); and Warren Booth, Laguna Hills, Calif. (US)
Assigned to Newport Corporation, Irvine, Calif. (US)
Filed on Oct. 24, 2003, as Appl. No. 10/693,222.
Prior Publication US 2005/0109914 A1, May 26, 2005
Int. Cl. F16M 11/00 (2006.01)
U.S. Cl. 248—638  [248/678] 18 Claims
OG exemplary drawing
 
1. A platform assembly that supports a vibration-sensitive payload, comprising:
a platform having a first surface coupled to a vibration-sensitive payload, a second surface, and a honeycomb inner core located between and coupled to the first and second surfaces; and
at least one vibration sensor located within said inner core and configured to sense a vibration of a surface of the platform.