US 7,321,652 B2 | ||
Multi-detector EDXRD | ||
Boris Yokhin, Nazareth Illit (Israel); Alexander Krokhmal, Haifa (Israel); and Alex Tokar, Haifa (Israel) | ||
Assigned to Jordan Valley Semiconductors Ltd., Migdal Ha'emek (Israel) | ||
Filed on Sep. 15, 2006, as Appl. No. 11/532,162. | ||
Claims priority of provisional application 60/717820, filed on Sep. 15, 2005. | ||
Prior Publication US 2007/0058779 A1, Mar. 15, 2007 | ||
Int. Cl. G01T 1/36 (2006.01) |
U.S. Cl. 378—82 [378/83] | 16 Claims |
1. A method for analysis of a sample, comprising:
irradiating an area of the sample with a polychromatic X-ray beam;
detecting X-rays scattered from the sample using a plurality of detectors simultaneously in different, respective positions,
whereby the detectors generate respective outputs;
applying energy-dispersive processing to the outputs of the detectors so as to identify one or more X-ray diffraction lines
of the sample; and
using the one or more X-ray diffraction lines to determine a crystalline structure of the sample.
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