US 7,320,424 B2 | ||
Linear split axis wire bonder | ||
David T. Beatson, Kenneth Square, Pa. (US); and E. Walter Frasch, Perkasie, Pa. (US) | ||
Assigned to Kulicke and Soffa Industries, Inc., Fort Washington, Pa. (US) | ||
Filed on Mar. 29, 2005, as Appl. No. 11/92,399. | ||
Claims priority of provisional application 60/568530, filed on May 05, 2004. | ||
Prior Publication US 2005/0247758 A1, Nov. 10, 2005 | ||
This patent is subject to a terminal disclaimer. | ||
Int. Cl. B23K 37/00 (2006.01); B23K 31/00 (2006.01); B23K 31/02 (2006.01) |
U.S. Cl. 228—4.5 [228/180.5] | 14 Claims |
1. A wire bonding machine for bonding a wire to a semiconductor device, the wire bonding machine comprising:
a wire bonding head having a bonding tool mounted to it, the bonding tool adapted to attach a wire end to a semiconductor
device;
a bonding head conveyance system adapted to (1) move the bonding tool in a vertical direction and (2) move the bonding tool
linearly along a first horizontal axis during a wire bonding operation wherein the wire bonding operation is the process of
attaching a conductive wire between bonding locations on the semiconductor device;
a work table adapted to support a semiconductor device to be wire bonded, and adapted to position the semiconductor device
into a bonding position prior to the wire bonding operation; and
a work table conveyance system adapted to translate the semiconductor device along a second horizontal axis during the wire
bonding operation, wherein the second horizontal axis is different from the first horizontal axis, and wherein the translation
of the semiconductor device during the wire bonding operation is distinct from the positioning of the semiconductor device
into the bonding position.
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