US 12,170,213 B2
Flat pocket susceptor design with improved heat transfer
Zhepeng Cong, San Jose, CA (US); and Nyi Oo Myo, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Feb. 17, 2021, as Appl. No. 17/178,204.
Prior Publication US 2022/0262658 A1, Aug. 18, 2022
Int. Cl. H01L 21/67 (2006.01); C23C 16/458 (2006.01); H01L 21/08 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67115 (2013.01) [C23C 16/4583 (2013.01); H01L 21/68735 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A susceptor, comprising:
an inner region having a pattern formed in a top surface thereof, the pattern comprising a plurality of substrate support features, wherein adjacent substrate support features of the plurality of substrate support features are separated by a venting channel of a plurality of venting channels;
a rim surrounding and coupled to the inner region, wherein the inner region is recessed relative to the rim to form a recessed pocket configured to receive a substrate; and
a plurality of bumps extending radially inward from an inner diameter of the rim, the plurality of bumps configured to contact an outer edge of a substrate supported by the plurality of substrate support features for positioning the substrate within the recessed pocket.