US 12,168,244 B2
Nanoscale thin film deposition systems
Sidlgata V. Sreenivasan, Austin, TX (US); Parth Pandya, Austin, TX (US); David Choi, Austin, TX (US); Shrawan Singhal, Austin, TX (US); and Lawrence Dunn, Austin, TX (US)
Assigned to Board of Regents, The University of Texas System, Austin, TX (US)
Appl. No. 17/801,481
Filed by Board of Regents, The University of Texas System, Austin, TX (US)
PCT Filed Feb. 25, 2021, PCT No. PCT/US2021/019732
§ 371(c)(1), (2) Date Aug. 22, 2022,
PCT Pub. No. WO2021/173873, PCT Pub. Date Sep. 2, 2021.
Claims priority of provisional application 62/981,182, filed on Feb. 25, 2020.
Prior Publication US 2023/0088746 A1, Mar. 23, 2023
Int. Cl. B05D 3/14 (2006.01); B05D 3/06 (2006.01); B29D 11/00 (2006.01); B32B 37/00 (2006.01); B41J 2/01 (2006.01); B82Y 35/00 (2011.01); G01B 13/22 (2006.01)
CPC B05D 3/148 (2013.01) [B05D 3/067 (2013.01); B05D 3/147 (2013.01); B29D 11/00432 (2013.01); B29D 11/0073 (2013.01); B32B 37/0038 (2013.01); B41J 2/01 (2013.01); B82Y 35/00 (2013.01); G01B 13/22 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A system for nanoscale precision programmable profiling, the system comprising:
a profiling module, wherein said profiling module has an inkjet for dispensing profiling material;
a subsystem for handling a roll-based superstrate, wherein said superstrate is used to form a contiguous film of said profiling material between said superstrate and a substrate;
a subsystem for handling said substrate comprising a vacuum chuck and a vertical tip-tilt stage, wherein an intermittent movement of said vacuum chuck with said vertical tip-tilt stage enables a formation of said contiguous film of said profiling material;
a subsystem for curing said profiling material; and
a metrology module.