US 12,168,759 B2
Detergent composition, substrate cleaning method, and cleaning method for support or substrate
Masahito Tanabe, Annaka (JP); and Michihiro Sugo, Annaka (JP)
Assigned to SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Appl. No. 17/603,219
Filed by SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
PCT Filed May 20, 2020, PCT No. PCT/JP2020/019986
§ 371(c)(1), (2) Date Oct. 12, 2021,
PCT Pub. No. WO2020/235605, PCT Pub. Date Nov. 26, 2020.
Claims priority of application No. 2019-096060 (JP), filed on May 22, 2019.
Prior Publication US 2022/0186152 A1, Jun. 16, 2022
Int. Cl. C11D 3/20 (2006.01); C11D 3/28 (2006.01); C11D 3/30 (2006.01); C11D 3/39 (2006.01); C11D 3/43 (2006.01); C11D 3/44 (2006.01); C11D 7/26 (2006.01); C11D 7/28 (2006.01)
CPC C11D 3/43 (2013.01) [C11D 3/2093 (2013.01); C11D 3/2096 (2013.01); C11D 3/28 (2013.01); C11D 3/3927 (2013.01); C11D 7/266 (2013.01); C11D 7/267 (2013.01); C11D 7/28 (2013.01); C11D 2111/22 (2024.01)] 3 Claims
OG exemplary drawing
 
1. A detergent composition suitable for removing temporary adhesive containing a silicone compound that is present on a substrate, the detergent composition comprising:
(A) an organic solvent: 76 to 95 parts by mass;
(B) water: 1 to 4 parts by mass; and
(C) an ammonium salt: 4 to 20 parts by mass
(where (A)+(B)+(C)=100 parts by mass), wherein
the organic solvent does not contain an organic solvent having a hydroxy group and contains, in 100 parts by mass of the organic solvent, 50 parts by mass or more of an organic solvent having a heteroatom,
the organic solvent comprises at least one kind selected from the group consisting of propylene glycol monomethyl ether acetate, dimethyl sulfoxide, butyl acetate, and cyclopentanone, and
the ammonium salt comprises a tetraalkylammonium salt, wherein the tetraalkylammonium salt comprises a fluoride ion.