CPC G03F 7/70775 (2013.01) [H01L 21/027 (2013.01); G03F 7/20 (2013.01)] | 25 Claims |
1. A positioning apparatus for positioning an object, the positioning apparatus comprising:
a first actuator and a second actuator configured to cause the object to move in a first direction;
a beam connected to the first actuator and the second actuator and configured to be movable in the first direction;
a third actuator configured to cause the object to move in a second direction relative to the beam, the second direction intersecting with the first direction; and
a control unit configured to:
control the first actuator and the second actuator to move the object to a first target position along the first direction;
control the third actuator to move the object to a second target position in the second direction; and
perform feedforward control with respect to the first actuator and the second actuator by applying, to each of the first actuator and the second actuator, a first correction operation amount different with each other for reducing rotation that occurs in the beam due to the movement of the object in the second direction, the different first correction operation amounts applied to the first actuator and the second actuators being obtained from a first operation amount to be applied to the third actuator to move the object in the second direction.
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