CPC G01Q 20/00 (2013.01) [G01Q 60/40 (2013.01); H01J 37/28 (2013.01)] | 28 Claims |
1. A method performed in a charged particle imaging system, the method comprising:
activating a charged particle beam within a first reference frame, the first reference frame associated with the charge particle beam;
correlating a sample stage reference frame with a sample reference frame;
causing, by a computerized control system, the charged particle beam and a conductive probe to intersect;
measuring an electrical response from a location where the charged particle beam and the conductive probe intersect;
determining a location of the conductive probe in a second reference frame based on the electric response from the intersection of the charged particle beam with the conductive probe, the second reference frame associated with the conductive probe; and
correlating the location of the conductive probe in the second reference frame with the first reference frame.
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