CPC G01N 23/2251 (2013.01) [G06T 5/50 (2013.01); G06T 5/70 (2024.01); H04N 7/181 (2013.01); H04N 23/56 (2023.01); H04N 23/74 (2023.01); H04N 23/90 (2023.01); G01N 2223/07 (2013.01); G01N 2223/418 (2013.01); G01N 2223/507 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20221 (2013.01)] | 6 Claims |
1. A charged particle beam apparatus comprising:
a charged particle beam optical system that irradiates a sample mounted on a sample stage with a charged particle beam;
a detector that detects a signal generated from the sample;
a charged particle beam imaging device that acquires an observation image from the signal detected by the detector;
an optical imaging device that captures an optical image of the sample;
a stage that rotatably holds the sample stage;
a stage control device that controls movement and a rotation operation of the stage; and
an image composition unit that combines the plurality of optical images to generate a composite image, wherein
the stage control device is configured, in order to control a degree of overlap in positions of the sample by the rotation operation, to move the stage so that a center of an imaging range of the optical imaging device is located at a position different from a rotation center of the stage and then, to rotate the stage,
the optical imaging device acquires a plurality of optical images relating to different positions of the sample by the rotation operation, and
the image composition unit combines the plurality of optical images obtained by the rotation operation based on the degree of overlap between images to generate the composite image.
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