CPC H01J 37/32844 (2013.01) [B01D 53/70 (2013.01); H01J 37/32357 (2013.01); H01J 37/32449 (2013.01); B01D 53/32 (2013.01); B01D 53/68 (2013.01); B01D 2251/102 (2013.01); B01D 2257/204 (2013.01); B01D 2257/2066 (2013.01); B01D 2258/0216 (2013.01); B01D 2259/818 (2013.01); H01J 37/32862 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/334 (2013.01); Y02C 20/30 (2013.01)] | 12 Claims |
1. A system for plasma abatement, the system comprising:
a processing chamber;
a chamber foreline;
a water and oxygen delivery system positioned downstream from and fluidly coupled to the processing chamber by the chamber foreline, the water and oxygen delivery system comprising:
a water vapor reagent source fluidly coupled with the chamber foreline via a first conduit; and
an oxygen reagent source fluidly coupled with the chamber foreline via a second conduit fluidly coupled with the first conduit;
a plasma source positioned downstream from and fluidly coupled with the water and oxygen delivery system via the chamber foreline; and
a first controller configured to:
cause the water and oxygen delivery system to deliver an abating reagent comprising water vapor and oxygen into the plasma source via the chamber foreline, wherein a mixture of the water vapor and the oxygen in the abating reagent is between 0.75×X+0.25×Y and 0.5×X+0.5×Y, X represents a water vapor only flow rate, and Y represents an oxygen only flow rate, the deliver the abating reagent comprising:
deliver the water vapor from the water vapor reagent source into the chamber foreline via the first conduit fluidly coupled with the chamber foreline; and
deliver the oxygen from the oxygen reagent source into the chamber foreline via the second conduit fluidly coupled with the first conduit; and
cause the plasma source to form a plasma from the water vapor, the oxygen, and an effluent comprising a fluorinated greenhouse gas to convert the fluorinated greenhouse gas to an abated material; and
wherein the water and oxygen delivery system comprises:
a housing comprising a floor that defines a horizontal plane and an interior wall extending vertically from the floor and dividing the housing into a first enclosed region and a second enclosed region;
the first enclosed region comprising the water vapor reagent source positioned on the floor and a flow control system positioned above the water vapor reagent source, the flow control system comprising a first flow controller that controls a flow of the water vapor, a second flow controller that controls a flow of the oxygen, and a third flow controller disposed between the first and second flow controller; and
the second enclosed region comprising a second controller configured to control tasks performable by components of the abatement system.
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