US 12,171,051 B2
Optical heating device and method of heating treatment
Tetsuya Kitagawa, Tokyo (JP); Takafumi Mizojiri, Tokyo (JP); Yoshiaki Nakamura, Tokyo (JP); Takehiko Yokomori, Tokyo (JP); and Keita Kanazu, Tokyo (JP)
Assigned to Ushio Denki Kabushiki Kaisha, Tokyo (JP)
Filed by Ushio Denki Kabushiki Kaisha, Tokyo (JP)
Filed on Jun. 16, 2021, as Appl. No. 17/349,792.
Claims priority of application No. 2020-118998 (JP), filed on Jul. 10, 2020.
Prior Publication US 2022/0015213 A1, Jan. 13, 2022
Int. Cl. H05B 47/16 (2020.01); G01J 5/10 (2006.01); G05D 23/20 (2006.01); H05B 45/18 (2020.01); H05B 47/155 (2020.01)
CPC H05B 47/16 (2020.01) [G01J 5/10 (2013.01); G05D 23/20 (2013.01); H05B 45/18 (2020.01); H05B 47/155 (2020.01)] 20 Claims
OG exemplary drawing
 
1. An optical heating device for heating a substrate, the optical heating device comprising:
a chamber for accommodating the substrate;
a support member for supporting the substrate in the chamber;
a plurality of LED elements for emitting light toward the substrate supported by the support member;
a flash lamp for emitting light toward the substrate supported by the support member;
a first lighting control unit for controlling the lighting of the flash lamp after a predetermined time has elapsed since the time of lighting the LED elements; and
a second lighting control unit for reducing the power supplied to the LED elements before the first lighting control unit controls the lighting of the flash lamp.