CPC H01L 21/68707 (2013.01) [B65G 47/90 (2013.01); H01L 21/67196 (2013.01)] | 20 Claims |
18. A transfer apparatus, comprising:
a central hub including a first shaft and a second shaft extending about and concentric with the first shaft, wherein the second shaft is counter-rotatable with the first shaft, and wherein the central hub is characterized by a central axis;
a flexible drive coupled with the first shaft, the flexible drive being configured to enable the first shaft to bend outward from the central axis; and
an end effector coupled with the first shaft, the end effector comprising a body having a plurality of arms.
|