CPC G01F 1/692 (2013.01) | 5 Claims |
1. An airflow amount measuring device comprising
a resin-sealed package including
a lead frame,
an airflow amount measuring element mounted on the lead frame and having a detection portion, and
a sealing resin member which seals the lead frame and the airflow amount measuring element such that at least the detection portion is exposed, wherein
a curvature radius ρ of an exposed portion of the airflow amount measuring element exposed from the sealing resin member is 2.13 mm or less,
the sealing resin member has a recessed groove-shaped passage having a pair of passage walls and a bottom wall from which the detection portion is exposed, and
the pair of passage walls forming the passage of the resin-sealed package covers both side edges of the airflow amount measuring element,
a maximum thickness h3 of the sealing resin member on a sensor element side with respect to the lead frame is twice or more of a maximum thickness h1 of the sealing resin member on a back surface side with respect to the lead frame,
in the lead frame, a hole is formed in a region obtained by projecting the detection portion on the lead frame in a direction perpendicular to a front surface of the airflow amount measuring element, and
a tape is attached to a back surface side of the lead frame to cover the hole.
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