US 12,170,353 B2
Method of making a lithium energy storage device
John Collins, Tarrytown, NY (US); Ali Afzali-Ardakani, Ossining, NY (US); Devendra K. Sadana, Pleasantville, NY (US); and Teodor Krassimirov Todorov, Yorktown Heights, NY (US)
Assigned to International Business Machines Corporation, Armonk, NY (US)
Filed by International Business Machines Corporation, Armonk, NY (US)
Filed on Apr. 18, 2019, as Appl. No. 16/388,851.
Claims priority of provisional application 62/787,629, filed on Jan. 2, 2019.
Prior Publication US 2020/0335826 A1, Oct. 22, 2020
Int. Cl. H01M 4/04 (2006.01); H01M 4/78 (2006.01); H01M 10/0525 (2010.01); H01M 10/0565 (2010.01); H01M 10/058 (2010.01); H01M 10/0585 (2010.01); H01M 10/44 (2006.01); H01M 4/02 (2006.01)
CPC H01M 10/0585 (2013.01) [H01M 4/0402 (2013.01); H01M 4/0447 (2013.01); H01M 4/78 (2013.01); H01M 10/0525 (2013.01); H01M 10/0565 (2013.01); H01M 10/058 (2013.01); H01M 10/446 (2013.01); H01M 2004/021 (2013.01); H01M 2300/0082 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method of making an energy storage device comprising the steps of:
forming one or more trenches in a solid silicon substrate, the silicon substrate having a substrate top and a substrate bottom, the trenches being through the substrate top into the silicon substrate, each trench having a trench bottom, one or more trench sides, and a trench cavity defined by the trench bottom and trench sides with a trench opening area at the substrate top;
depositing region interface precursors on the trench bottom, wherein the region interface precursors include: a Lithium compound, a conductive adhesive, and a doping material;
depositing one or more anode materials in the trench cavity above the region interface precursors;
depositing one or more solid polymer electrolytes (SPE) on the anode materials; and
depositing one or more cathode materials on the SPE.