CPC H01L 21/67115 (2013.01) [C23C 16/4583 (2013.01); H01L 21/68735 (2013.01)] | 19 Claims |
1. A susceptor, comprising:
an inner region having a pattern formed in a top surface thereof, the pattern comprising a plurality of substrate support features, wherein adjacent substrate support features of the plurality of substrate support features are separated by a venting channel of a plurality of venting channels;
a rim surrounding and coupled to the inner region, wherein the inner region is recessed relative to the rim to form a recessed pocket configured to receive a substrate; and
a plurality of bumps extending radially inward from an inner diameter of the rim, the plurality of bumps configured to contact an outer edge of a substrate supported by the plurality of substrate support features for positioning the substrate within the recessed pocket.
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