CPC B25J 9/1692 (2013.01) [B25J 9/1697 (2013.01); B25J 11/0095 (2013.01); B25J 21/005 (2013.01)] | 21 Claims |
1. A robot calibration system, comprising:
a calibration fixture configured to be mounted on a substrate processing chamber, wherein the calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate; and
a controller configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.
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