US 12,170,186 B2
Showerhead assembly with heated showerhead
Anantha K. Subramani, San Jose, CA (US); Seyyed Abdolreza Fazeli, Santa Clara, CA (US); Yang Guo, San Mateo, CA (US); Chandrashekara Baginagere, Bangalore (IN); Ramcharan Sundar, Bangalore (IN); Yunho Kim, San Jose, CA (US); and Rajasekhar Patibandla, Bangalore (IN)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 15, 2022, as Appl. No. 17/721,417.
Prior Publication US 2023/0335377 A1, Oct. 19, 2023
Int. Cl. H01J 37/32 (2006.01); C23C 16/455 (2006.01); C23C 16/505 (2006.01)
CPC H01J 37/3244 (2013.01) [C23C 16/45565 (2013.01); C23C 16/505 (2013.01); H01J 37/32357 (2013.01); H01J 37/32422 (2013.01); H01J 2237/332 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A showerhead assembly for use in a process chamber, comprising:
a heated showerhead having a heater and a gas diffusion plate coupled to the heater, the gas diffusion plate having a plurality of channels extending through the gas diffusion plate;
an ion filter spaced from the heated showerhead, the ion filter having a first side facing the heated showerhead and a second side opposite the first side, the ion filter having a plurality of channels extending through the ion filter;
a heat transfer ring in contact with the heated showerhead and the ion filter, the heat transfer ring being thermally conductive and electrically insulative, the heat transfer ring comprised of a plurality of elements separated from one another along an interface between the heated showerhead and the ion filter; and
a remote plasma region defined between the heated showerhead and the ion filter.