CPC G06T 7/001 (2013.01) [B24B 37/013 (2013.01); G06T 7/60 (2013.01); G06T 2207/10024 (2013.01); G06T 2207/20021 (2013.01); G06T 2207/20081 (2013.01); G06T 2207/20084 (2013.01); G06T 2207/30148 (2013.01)] | 18 Claims |
1. A computer program product, comprising a non-transitory computer-readable medium encoded with instructions to cause one or more processors to:
receive a first color image of a first substrate from an in-line monitoring station of a polishing system;
divide the first color image into a plurality of second color images using a die mask such that each second color image corresponds to a region for a die being fabricated on the first substrate;
generate residue measurements for one or more locations, each respective location of the one more locations corresponding to a respective region for a die being fabricated on the first substrate, wherein the instructions to generate the residue measurement for a region include instructions to process a second color image corresponding to the region through a neural network that was trained using training data that included a plurality of third color images of dies of a calibration substrate and ground truth residue measurements of the calibration substrate with each respective third color image paired with a ground truth residue measurement for a die region associated with the respective third color image; and
determine a value for a polishing parameter for the first substrate or a subsequent second substrate based on the residue measurements.
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