CPC G01R 1/07357 (2013.01) [G01R 1/06716 (2013.01)] | 10 Claims |
1. A probe pin used in a probe card, which comprises the probe pin sequentially coupled to an upper plate comprising an upper guide hole and a lower plate comprising a lower guide hole, the probe pin comprising:
an elastic beam part which is disposed between a lower contact part in contact with a device to be tested, and an upper contact part spaced apart at a predetermined distance from the lower contact part and in contact with a test device, and is composed of a pair of elastic beams separated from one another by a predetermined gap in order to be elastically deformed by an external force; and
a separation prevention protrusion part comprising separation prevention protrusions protruding from at least one of the pair of elastic beams in order to prevent the elastic beam part from being separated through an upper guide hole of an upper plate,
wherein the elastic beam part is formed so that in the case of being inserted through the upper guide hole, a gap of separation between the pair of elastic beams is reduced by being elastically deformed by a force generated by contact between the separation prevention protrusions and the upper guide hole, and in the state of being inserted and coupled through the upper guide hole, a distance between the pair of elastic beams, including the separation prevention protrusions, is greater than a diameter of the upper guide hole.
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