CPC H01L 25/0657 (2013.01) [H01L 21/02532 (2013.01); H01L 21/3212 (2013.01); H01L 21/76802 (2013.01); H01L 21/7684 (2013.01); H01L 21/76877 (2013.01); H01L 21/823418 (2013.01); H01L 21/823475 (2013.01); H01L 21/823481 (2013.01); H01L 21/823487 (2013.01); H01L 23/528 (2013.01); H01L 25/50 (2013.01); H01L 29/0847 (2013.01); H01L 29/45 (2013.01); H01L 29/665 (2013.01); H01L 2225/06541 (2013.01); H01L 2225/06565 (2013.01)] | 28 Claims |
1. A method comprising:
providing a substrate having a back side and a top side opposite the back side, the substrate comprising active devices coupled to buried lines extending parallel to a major surface of the substrate, the active devices closer to the top side than the back side of the substrate; and
exposing the buried lines from the back side of the substrate.
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