US 12,170,277 B2
Integrated circuit and manufacturing method of the same
Kam-Tou Sio, Hsinchu County (TW); and Jiann-Tyng Tzeng, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed on May 11, 2021, as Appl. No. 17/317,708.
Claims priority of provisional application 63/147,303, filed on Feb. 9, 2021.
Prior Publication US 2022/0254769 A1, Aug. 11, 2022
Int. Cl. H01L 23/528 (2006.01); H01L 21/02 (2006.01); H01L 21/8238 (2006.01); H01L 27/02 (2006.01); H01L 27/092 (2006.01); H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01)
CPC H01L 27/0207 (2013.01) [H01L 21/0259 (2013.01); H01L 21/823807 (2013.01); H01L 21/823871 (2013.01); H01L 23/5286 (2013.01); H01L 27/092 (2013.01); H01L 29/0665 (2013.01); H01L 29/42392 (2013.01); H01L 29/66742 (2013.01); H01L 29/78696 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An integrated circuit, comprising:
a driver cell having a first cell height, comprising:
a first active area and a second active area that extend in a first direction on a front side of the integrated circuit; and
a first conductive line extending in the first direction on a back side of the integrated circuit, and being coupled to the first active area and the second active area through a first via and a second via respectively;
at least one transmission cell having a second cell height different from the first cell height, comprising:
a third active area and a fourth active area that extend in the first direction on the front side of the integrated circuit;
a second conductive line extending in the first direction on the back side of the integrated circuit, and being coupled to the third active area and the fourth active area through a third via and a fourth via respectively; and
a conductor crossing over and being coupled to the third active area and the fourth active area; and
a plurality of third conductive lines on the back side of the integrated circuit, coupled between the first conductive line and the second conductive line to transmit a signal between the driver cell and the at least one transmission cell.