CPC H10K 50/865 (2023.02) [H01L 27/124 (2013.01); H10K 59/1213 (2023.02); H10K 59/1315 (2023.02); H10K 59/353 (2023.02); H10K 59/38 (2023.02)] | 23 Claims |
1. A display substrate, comprising a base substrate and a plurality of sub-pixels located on the base substrate, wherein each of the plurality of sub-pixels comprises:
a conductive light-shielding structure, located on the base substrate;
a buffer layer, located on a side of the conductive light-shielding structure away from the base substrate;
a semiconductor layer, located on a side of the buffer layer away from the conductive light-shielding structure;
an interlayer insulating layer, located on a side of the semiconductor layer away from the buffer layer; and
a conductive layer, located on a side of the interlayer insulating layer away from the semiconductor layer, and comprising a conductive structure,
wherein the conductive light-shielding structure comprises a first main body portion and a first recessed portion, the display substrate further comprises a first contact hole, the first contact hole penetrates both the interlayer insulating layer and the buffer layer, the conductive structure is electrically connected with the first recessed portion through the first contact hole, an area of a surface of the first recessed portion close to the conductive layer is larger than an area of an orthographic projection of the first recessed portion on the base substrate, and an average thickness of the first recessed portion in a direction perpendicular to the base substrate is smaller than an average thickness of the first main body portion in the direction perpendicular to the base substrate,
the buffer layer comprises:
a first buffer portion, wherein a side of the first buffer portion away from the base substrate is arranged in contact with the conductive layer, and a side of the first buffer portion close to the base substrate is arranged in contact with the conductive light-shielding structure; and
a second buffer portion, wherein a side of the second buffer portion away from the base substrate is arranged in contact with the interlayer insulating layer, and a side of the second buffer portion close to the base substrate is arranged in contact with the conductive light-shielding structure.
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8. A display substrate, comprising a base substrate and a plurality of sub-pixels located on the base substrate, wherein each of the plurality of sub-pixels comprises:
a conductive light-shielding structure, located on the base substrate;
a buffer layer, located on a side of the conductive light-shielding structure away from the base substrate;
a semiconductor layer, located on a side of the buffer layer away from the conductive light-shielding structure;
an interlayer insulating layer, located on a side of the semiconductor layer away from the buffer layer; and
a conductive layer, located on a side of the interlayer insulating layer away from the semiconductor layer, and comprising a conductive structure,
wherein the conductive light-shielding structure comprises a first main body portion and a first recessed portion, the display substrate further comprises a first contact hole, the first contact hole penetrates both the interlayer insulating layer and the buffer layer, the conductive structure is electrically connected with the first recessed portion through the first contact hole, an area of a surface of the first recessed portion close to the conductive layer is larger than an area of an orthographic projection of the first recessed portion on the base substrate, and an average thickness of the first recessed portion in a direction perpendicular to the base substrate is smaller than an average thickness of the first main body portion in the direction perpendicular to the base substrate,
the first recessed portion comprises a first edge portion, and in a direction from an edge of the first recessed portion to a center of the first recessed portion, a thickness of the first edge portion in the direction perpendicular to the base substrate gradually decreases.
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14. A display substrate, comprising a base substrate and a plurality of sub-pixels located on the base substrate, wherein each of the plurality of sub-pixels comprises:
a conductive light-shielding structure, located on the base substrate;
a buffer layer, located on a side of the conductive light-shielding structure away from the base substrate;
a semiconductor layer, located on a side of the buffer layer away from the conductive light-shielding structure;
an interlayer insulating layer, located on a side of the semiconductor layer away from the buffer layer; and
a conductive layer, located on a side of the interlayer insulating layer away from the semiconductor layer, and comprising a conductive structure,
wherein the conductive light-shielding structure comprises a first main body portion and a first recessed portion, the display substrate further comprises a first contact hole, the first contact hole penetrates both the interlayer insulating layer and the buffer layer, the conductive structure is electrically connected with the first recessed portion through the first contact hole, an area of a surface of the first recessed portion close to the conductive layer is larger than an area of an orthographic projection of the first recessed portion on the base substrate, and an average thickness of the first recessed portion in a direction perpendicular to the base substrate is smaller than an average thickness of the first main body portion in the direction perpendicular to the base substrate,
each of the sub-pixels comprises a pixel driving circuit, the pixel driving circuit comprises a first thin film transistor, and the conductive structure is a first drain electrode of the first thin film transistor.
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