US 12,169,356 B2
Mask plate
Jiabin Zou, Sr., Beijing (CN); Xiaofeng Yin, Beijing (CN); Chunguang Tian, Beijing (CN); and Na Wen, Beijing (CN)
Assigned to Beijing BOE Display Technology Co., Ltd., Beijing (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
Appl. No. 17/639,071
Filed by Beijing BOE Display Technology Co., Ltd., Beijing (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
PCT Filed Apr. 9, 2021, PCT No. PCT/CN2021/086282
§ 371(c)(1), (2) Date Feb. 28, 2022,
PCT Pub. No. WO2021/223569, PCT Pub. Date Nov. 11, 2021.
Claims priority of application No. 202010383667.X (CN), filed on May 8, 2020.
Prior Publication US 2022/0326599 A1, Oct. 13, 2022
Int. Cl. G03F 1/38 (2012.01); G02F 1/1335 (2006.01); G02F 1/1362 (2006.01)
CPC G03F 1/38 (2013.01) [G02F 1/133512 (2013.01); G02F 1/13625 (2021.01)] 12 Claims
OG exemplary drawing
 
1. A mask, comprising:
a first graphic region and a second graphic region disposed along a first direction, and a third graphic region, wherein the first graphic region comprises a first splicing exposure region, the second graphic region comprises a second splicing exposure region, the first splicing exposure region is used for, after being translated along a first vector, forming a first splicing auxiliary region, and the first splicing auxiliary region coincides with the second splicing exposure region;
a plurality of light-shielding strips arranged along a second direction, the second direction being perpendicular to the first direction, wherein any one of the light-shielding strips comprises a first splicing light-shielding strip and a second splicing light-shielding strip correspondingly disposed, the first splicing light-shielding strip is provided in the first splicing exposure region, and penetrates the first splicing exposure region in the first direction, and the second splicing light-shielding strip is provided in the second splicing exposure region, and penetrates the second splicing exposure region in the first direction; and
a width of one of the first splicing light-shielding strip and corresponding second splicing light-shielding strip is equal to a target width, a width of the other one is equal to a first auxiliary width, and the first auxiliary width is greater than the target width, a pattern of the first splicing light-shielding strip is used for, after being translated along the first vector, forming a first auxiliary splicing pattern, and the first auxiliary splicing pattern is located within the corresponding second splicing light-shielding strip, or the first auxiliary splicing pattern covers the corresponding second splicing light-shielding strip, wherein:
the first graphic region further comprises a first independent exposure region, the first independent exposure region is disposed adjacent to the first splicing exposure region along the first direction, the second graphic region further comprises a second independent exposure region, the second independent exposure region is disposed adjacent to the second splicing exposure region along the first direction, the first independent exposure region is used for, after being translated along the first vector, forming a first independent auxiliary region, and the first independent auxiliary region and the second independent exposure region are located on both sides of the second splicing exposure region, respectively;
any one of the light-shielding strips further comprises a first independent light-shielding strip disposed corresponding to the first splicing light-shielding strip and a second independent light-shielding strip disposed corresponding to the second splicing light-shielding strip, the first independent light-shielding strip is provided in the first independent exposure region and connected with corresponding first splicing light-shielding strip, and penetrates the first independent exposure region in the first direction, and the second independent light-shielding strip is provided in the second independent exposure region and connected with corresponding second splicing light-shielding strip, and penetrates the second independent exposure region in the first direction;
widths of the first independent light-shielding strip and the second independent light-shielding strip are both equal to the target width;
the third graphic region comprises a third independent exposure region and a third splicing exposure region adjacently disposed along the first direction, the first graphic region further comprises a fourth splicing exposure region, and the fourth splicing exposure region and the first splicing exposure region are disposed on both sides of the first independent exposure region, respectively;
the fourth splicing exposure region is used for, after being translated along a second vector, forming a second splicing auxiliary region, and the second splicing auxiliary region coincides with the third splicing exposure region, and the first independent exposure region is used for, after being translated along the second vector, forming a second independent auxiliary region, and the second independent auxiliary region and the third independent exposure region are located on both sides of the third splicing exposure region, respectively;
the light-shielding strips further comprise a third splicing light-shielding strip disposed corresponding to the first splicing light-shielding strip, a fourth splicing light-shielding strip disposed corresponding to the second splicing light-shielding strip, and a third independent light-shielding strip disposed corresponding to the first independent light-shielding strip and the second independent light-shielding strip, the third independent light-shielding strip is provided in the third independent exposure region, and penetrates the third independent exposure region in the first direction, and a width of the third independent light-shielding strip is equal to the target width;
the third splicing light-shielding strip is provided in the third splicing exposure region and connected with corresponding third independent light-shielding strip, and penetrates the third splicing exposure region in the first direction, and the fourth splicing light-shielding strip is provided in the fourth splicing exposure region and connected with corresponding first independent light-shielding strip, and penetrates the fourth splicing exposure region in the first direction;
a width of one of the fourth splicing light-shielding strip and corresponding third splicing light-shielding strip is equal to the target width, a width of the other one is equal to a second auxiliary width, and the second auxiliary width is greater than the target width, a pattern of the fourth splicing light-shielding strip is used for, after being translated along the second vector, forming a second auxiliary splicing pattern, and the second auxiliary splicing pattern is located within corresponding third splicing light-shielding strip, or the second auxiliary splicing pattern covers the corresponding third splicing light-shielding strip;
the fourth splicing exposure region is used for, after being translated along a third vector, forming a third splicing auxiliary region, and the third splicing auxiliary region coincides with the first splicing exposure region;
a pattern of the fourth splicing light-shielding strip, is used for, after being translated along the third vector, forming a third auxiliary splicing pattern, the first splicing light-shielding strip is provided with at least a sacrificial light-shielding segment along an extending direction of the first splicing light-shielding strip, and the sacrificial light-shielding segment is completely non-overlapped with the third auxiliary splicing pattern; and
a plurality of light-shielding strip groups are formed by the plurality of the light-shielding strips, any one of the light-shielding strip groups comprises a previous light-shielding strip and a latter light-shielding strip adjacently disposed, and in any one of the light-shielding strip groups:
one end of the second independent light-shielding strip of the previous light-shielding strip close to the second splicing exposure region is bent towards a direction away from the latter light-shielding strip, one end of the third independent light-shielding strip of the previous light-shielding strip close to the third splicing exposure region is bent towards the direction away from the latter light-shielding strip, one end of the second independent light-shielding strip of the latter light-shielding strip close to the second splicing exposure region is bent towards a direction away from the previous light-shielding strip, and one end of the third independent light-shielding strip of the latter light-shielding strip close to the third splicing exposure region is bent towards the direction away from the previous light-shielding strip;
along a direction away from the first independent exposure region, the first splicing light-shielding strip of the previous light-shielding strip extends towards the direction away from the latter light-shielding strip, the first splicing light-shielding strip of the latter light-shielding strip extends towards the direction away from the previous light-shielding strip, the fourth splicing light-shielding strip of the previous light-shielding strip extends towards the direction away from the latter light-shielding strip, and the fourth splicing light-shielding strip of the latter light-shielding strip extends towards the direction away from the previous light-shielding strip;
along a direction away from the second independent exposure region, the second splicing light-shielding strip of the previous light-shielding strip extends towards a direction close to the latter light-shielding strip, and the second splicing light-shielding strip of the latter light-shielding strip extends towards a direction close to the previous light-shielding strip; and
along a direction away from the third independent exposure region, the third splicing light-shielding strip of the previous light-shielding strip extends towards the direction close to the latter light-shielding strip, and the third splicing light-shielding strip of the latter light-shielding strip extends towards the direction close to the previous light-shielding strip.