US 12,170,295 B2
Photomask, display device, and manufacturing method thereof
Dong Hee Shin, Asan-si (KR); Geun Ho Lee, Hwaseong-si (KR); and Yong Hee Lee, Suwon-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on Jan. 25, 2024, as Appl. No. 18/422,006.
Application 18/422,006 is a division of application No. 17/125,836, filed on Dec. 17, 2020, granted, now 11,923,383.
Claims priority of application No. 10-2020-0036267 (KR), filed on Mar. 25, 2020.
Prior Publication US 2024/0170504 A1, May 23, 2024
Int. Cl. H01L 27/12 (2006.01); G03F 1/42 (2012.01); G03F 1/70 (2012.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); H01L 23/544 (2006.01)
CPC H01L 27/1288 (2013.01) [G03F 1/42 (2013.01); G03F 1/70 (2013.01); G03F 7/0007 (2013.01); G03F 7/2022 (2013.01); H01L 23/544 (2013.01); H01L 2223/54493 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A manufacturing method of a display device comprising:
forming a metal layer and a photoresist on a substrate;
aligning a photomask on the substrate and irradiating light onto the photomask;
repeating a process of shifting the photomask and irradiating the light onto the photomask;
forming a test resist pattern on the display device by developing the photoresist;
determining an alignment error of the photomask based on a shape of the test resist pattern, and repeating processes of forming, aligning, irradiating, shifting, and developing based on determination of the alignment error; and
etching the metal layer by using the photoresist as a mask,
wherein the test resist pattern includes:
a first test resist pattern, a second test resist pattern, and a third test resist pattern disposed along a first edge of the substrate,
the third test resist pattern is disposed between the first test resist pattern and the second test resist pattern,
the first test resist pattern has a first outer shape and a first inner shape,
the third test resist pattern has a third outer shape and a third inner shape, and
the second test resist pattern has a second outer shape.