US 12,170,221 B2
Apparatus for processing substrate
Won Woo Jung, Gwangju-si (KR); Young-Rok Kim, Gwangju-si (KR); Yoo Seong Kim, Gwangju-si (KR); Jong Sik Kim, Gwangju-si (KR); and Chul Joo Hwang, Gwangju-si (KR)
Assigned to JUSUNG ENGINEERING CO., LTD., (KR)
Appl. No. 17/042,091
Filed by JUSUNG ENGINEERING CO., LTD., Gwangju-si (KR)
PCT Filed Mar. 27, 2019, PCT No. PCT/KR2019/003573
§ 371(c)(1), (2) Date Sep. 25, 2020,
PCT Pub. No. WO2019/194459, PCT Pub. Date Oct. 10, 2019.
Claims priority of application No. 10-2018-0038594 (KR), filed on Apr. 3, 2018; and application No. 10-2018-0164262 (KR), filed on Dec. 18, 2018.
Prior Publication US 2021/0193501 A1, Jun. 24, 2021
Int. Cl. H01L 21/687 (2006.01); C23C 16/458 (2006.01)
CPC H01L 21/6875 (2013.01) [C23C 16/4584 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An apparatus for processing substrate, the apparatus comprising:
a plurality of supporting parts, each of the plurality of supporting parts supporting a substrate;
a disk supporting the plurality of supporting parts;
a lid disposed apart from the disk;
a first protrusion portion coupled to the disk to protrude in an upward direction from the disk to the lid in a center region disposed inward from the supporting parts and to protrude in the upward direction in between the supporting parts;
a second protrusion portion protruding in the upward direction from an upper surface of the first protrusion portion in the center region; and
a purge unit coupled to the lid and having holes formed therein for distributing a purge gas,
wherein the second protrusion portion comprises a dispersion groove for dispersing the purge gas distributed by the purge unit,
wherein the dispersion groove is provided on an upper surface of the second protrusion portion which is disposed to face the direction in which the purge gas is distributed from the purge unit,
wherein the second protrusion portion is formed to increase a distance by which the upper surface of the second protrusion portion is spaced apart from the purge unit,
wherein the dispersion groove is provided to have a size which is reduced as the dispersion groove extends in a downward direction from the purge unit to the second protrusion portion, and
wherein surfaces of dispersion groove are inclined at an oblique angle to form a “V”-shaped groove.