CPC B05D 3/148 (2013.01) [B05D 3/067 (2013.01); B05D 3/147 (2013.01); B29D 11/00432 (2013.01); B29D 11/0073 (2013.01); B32B 37/0038 (2013.01); B41J 2/01 (2013.01); B82Y 35/00 (2013.01); G01B 13/22 (2013.01)] | 14 Claims |
1. A system for nanoscale precision programmable profiling, the system comprising:
a profiling module, wherein said profiling module has an inkjet for dispensing profiling material;
a subsystem for handling a roll-based superstrate, wherein said superstrate is used to form a contiguous film of said profiling material between said superstrate and a substrate;
a subsystem for handling said substrate comprising a vacuum chuck and a vertical tip-tilt stage, wherein an intermittent movement of said vacuum chuck with said vertical tip-tilt stage enables a formation of said contiguous film of said profiling material;
a subsystem for curing said profiling material; and
a metrology module.
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