US 12,170,300 B2
Metal mirror based multispectral filter array of optical sensor device
Georg J. Ockenfuss, Santa Rosa, CA (US)
Assigned to VIAVI Solutions Inc., Chandler, AZ (US)
Filed by VIAVI Solutions Inc., Chandler, AZ (US)
Filed on May 2, 2023, as Appl. No. 18/310,769.
Application 18/310,769 is a continuation of application No. 17/445,623, filed on Aug. 23, 2021, granted, now 11,670,658.
Application 17/445,623 is a continuation of application No. 15/929,371, filed on Apr. 29, 2020, granted, now 11,114,485, issued on Sep. 7, 2021.
Application 15/929,371 is a continuation of application No. 15/922,415, filed on Mar. 15, 2018, granted, now 10,651,216, issued on May 12, 2020.
Application 15/922,415 is a continuation of application No. 15/385,240, filed on Dec. 20, 2016, granted, now 9,923,007, issued on Mar. 20, 2018.
Claims priority of provisional application 62/294,970, filed on Feb. 12, 2016.
Claims priority of provisional application 62/272,086, filed on Dec. 29, 2015.
Prior Publication US 2023/0268362 A1, Aug. 24, 2023
Int. Cl. H01L 31/02 (2006.01); G01J 3/02 (2006.01); G01J 3/26 (2006.01); G01J 3/28 (2006.01); G01J 3/36 (2006.01); G01J 3/51 (2006.01); G02B 5/28 (2006.01); H01L 27/14 (2006.01); H01L 27/146 (2006.01); H01L 31/0216 (2014.01); H01L 33/46 (2010.01); H01L 33/60 (2010.01); H10K 50/856 (2023.01); H10K 59/38 (2023.01)
CPC H01L 27/14621 (2013.01) [G01J 3/0208 (2013.01); G01J 3/26 (2013.01); G01J 3/2803 (2013.01); G01J 3/36 (2013.01); G01J 3/51 (2013.01); G01J 3/513 (2013.01); G02B 5/286 (2013.01); G02B 5/288 (2013.01); H01L 27/1462 (2013.01); H01L 27/14627 (2013.01); H01L 27/14629 (2013.01); H01L 27/1464 (2013.01); H01L 27/14643 (2013.01); H01L 27/14685 (2013.01); H01L 31/02162 (2013.01); H01L 33/46 (2013.01); H01L 33/60 (2013.01); H10K 50/856 (2023.02); H10K 59/38 (2023.02); G01J 2003/2806 (2013.01); G01J 2003/2826 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical sensor device, comprising:
a substrate including one or more optical sensors;
a first zinc-oxide layer;
a metal mirror layer; and
a second zinc-oxide layer,
the first zinc-oxide layer and the second zinc-oxide layer at least partially enclosing the metal mirror layer.