Subclass Subgroup Patent
H01L 29/063 12170311
  29/0634 12170312
  29/0642 12170313
  29/0653 12170314
  29/0673 12170315
  29/2003 12170316
  29/24 12170317
  29/36 12170318
  29/41791 12170319
    12170320
  29/42368 12170321
  29/42392 12170322
    12170323
  29/517 12170324
  29/66507 12170325
  29/66666 12170326
  29/66795 12170327
  29/7786 12170328
  29/7816 12170329
  29/7827 12170330
  29/785 12170331
    12170332
  29/7851 12170333
  29/7856 12170334
  29/78618 12170335
  29/7869 12170336
    12170337
    12170338
    12170339
  29/86 12170340