CPC G01R 1/07378 (2013.01) [G01R 1/07342 (2013.01); G01R 31/2886 (2013.01)] | 4 Claims |
1. A probe head for guiding a probe, the probe head comprising:
a guide plate that has a guide hole into which the probe is inserted and is made of a photoresist capable of lithography,
wherein the photoresist has a light-transmitting property, and
wherein the photoresist is subjected to heat treatment, so that the heat-treated photoresist has a hardness increased compared to before the heat treatment.
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