CPC F16K 31/004 (2013.01) [F16K 31/007 (2013.01); G05D 16/2086 (2013.01); H02N 2/043 (2013.01); Y10T 137/7826 (2015.04)] | 6 Claims |
1. A piezoelectric valve comprising:
a plurality of actuators that respectively drive a plurality of valve bodies, the plurality of valve bodies individually driven in parallel planes;
a valve seat plate including a plurality of valve seats and a plurality of discharge passages, each of the valve seats of the plurality of valve seats are respectively adapted to be positioned in contact with and away from the plurality of valve bodies individually, and the valve seat plate having the plurality of actuators fixed thereto; and
a body case that houses the valve seat plate,
wherein:
each of the plurality of actuators includes
a proximal portion fixed to the valve seat plate,
a piezoelectric element having one end portion connected to an attachment face of the proximal portion and extending in a first longitudinal direction,
a support portion integrally formed with the proximal portion, the support portion being arranged side-by-side with the piezoelectric element and extending in a second longitudinal direction crossing the first longitudinal direction,
an operating portion connected to another end portion of the piezoelectric element and to a distal end portion of the support portion, the operating portion being adapted to be displaced in a displacement direction different from each of the first longitudinal direction and the second longitudinal direction along with expansion and contraction of the piezoelectric element, and
the valve body provided on a side of the operating portion along the displacement direction, the valve body being adapted to be driven in response to a displacement of the operating portion, and
the body case includes
a gas supply port through which compressed gas is supplied, and
a plurality of gas outlet ports that individually discharge the compressed gas supplied from the gas supply port via the respective discharge passages of the valve seat plate while the plurality of valve bodies and the plurality of valve seats are respectively positioned away from each other.
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