CPC H01J 37/32724 (2013.01) [H01J 37/32577 (2013.01); H01L 21/6833 (2013.01)] | 13 Claims |
1. A substrate supporting apparatus comprising:
a body configured to support a substrate and formed of a dielectric substance;
a heat transfer medium supply hole installed to penetrate the body;
a first electrostatic electrode disposed in the body; and
a second electrostatic electrode disposed in the body, located on the first electrostatic electrode, and electrically connected to the first electrostatic electrode,
wherein a surface area of the first electrostatic electrode is smaller than a surface area of the second electrostatic electrode, and
wherein the first electrostatic electrode and a heater are disposed at a same level.
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