CPC H01J 37/3299 (2013.01) [G01K 13/00 (2013.01); H01J 2237/24585 (2013.01)] | 10 Claims |
1. A temperature estimation apparatus, the apparatus comprising:
a memory; and
one or more processing circuits coupled to the memory and configured to
obtain time series process data relating to conditions inside a processing space in which plasma processing is performed;
successively estimate temperature data by successively inputting the obtained time series process data into a time series model generated in advance that correlates data values, in each time period, of time series process data relating to conditions inside the processing space, with a data value, at a respective time point, of time series temperature data measured inside the processing space; and
adjust a time length of the plasma processing or an amount of power of an RE power supply, prior to a start of the plasma processing or during the plasma processing, such that the successively estimated temperature data approach a target temperature.
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