US 12,169,363 B2
Radiation source testing
Russell Allen Burdt, San Diego, CA (US); and Thomas Patrick Duffey, San Diego, CA (US)
Assigned to Cymer, LLC, San Diego, CA (US)
Appl. No. 17/772,207
Filed by Cymer, LLC, San Diego, CA (US)
PCT Filed Oct. 16, 2020, PCT No. PCT/US2020/055987
§ 371(c)(1), (2) Date Apr. 27, 2022,
PCT Pub. No. WO2021/086640, PCT Pub. Date May 6, 2021.
Claims priority of provisional application 62/928,254, filed on Oct. 30, 2019.
Prior Publication US 2022/0404717 A1, Dec. 22, 2022
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70516 (2013.01) [G03F 7/70591 (2013.01)] 30 Claims
OG exemplary drawing
 
1. A method of generating a test for a radiation source for a lithographic apparatus, the method comprising the steps of:
receiving data corresponding to a plurality of firing patterns of the radiation source; and
analyzing the data to determine parameters for configuring one or more further firing patterns for testing the radiation source;
wherein the parameters are determined such that a stability of the radiation source when executing the one or more further firing patterns configured using the parameters is substantially the same as, or within predefined bounds relative to, a stability of the radiation source when executing the plurality of firing patterns,
and a total duration of the one or more further firing patterns when executed by the radiation source will be less than a duration of the plurality of firing patterns when executed by the radiation source.