Subclass Subgroup Patent
H01L 21/02043 12170195
  21/02049 12170196
  21/0228 12170197
    12170198
  21/02282 12170199
  21/0262 12170200
  21/0338 12170201
  21/28088 12170202
  21/28123 12170203
  21/304 12170204
  21/31144 12170205
  21/32135 12170206
  21/563 12170207
  21/67017 12170208
  21/6708 12170209
    12170210
  21/67092 12170211
    12170212
  21/67115 12170213
  21/67248 12170214
  21/67259 12170215
  21/67742 12170216
  21/6833 12170217
    12170218
    12170219
  21/68707 12170220
  21/6875 12170221
  21/68764 12170222
  21/76898 12170223
  21/78 12170224
    12170225
  21/8213 12170226
  21/8221 12170227
  21/823431 12170228
  21/823481 12170229
  21/823807 12170230
  21/823857 12170231