US 12,169,156 B2
Test management module and vehicle test system having the same
Seung Wan An, Hwaseong-si (KR); Jae Uk Kim, Seoul (KR); Min Gi Choi, Incheon (KR); and Hyun Seong Moon, Hwaseong-si (KR)
Assigned to SEMES CO., LTD., Cheonan-si (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Mar. 11, 2022, as Appl. No. 17/692,578.
Claims priority of application No. 10-2021-0032746 (KR), filed on Mar. 12, 2021.
Prior Publication US 2022/0291088 A1, Sep. 15, 2022
Int. Cl. G01M 17/08 (2006.01); H01L 21/677 (2006.01)
CPC G01M 17/08 (2013.01) [H01L 21/67724 (2013.01); H01L 21/67733 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A semiconductor processing apparatus vehicle test system, comprising:
a vehicle including:
driving wheels to roll along a driving rail to transport a carrier while in a semiconductor processing apparatus:
a vehicle controlling part; and
a plurality of sensors;
a test station including:
a jig that receives the vehicle therein, the jig including a test station rail supporting the driving wheels of the vehicle and including rollers to contact the driving wheels to drive the vehicle at a same position in the test station, and
a station manager controlling the jig and in communication with the vehicle controlling part; and
a test management module including:
a test manager writing a test list, the test list including:
an event condition to be generated in the vehicle in the test station; and
operation information of an operation of the vehicle in the test station, which is performed by the vehicle when the event condition is satisfied, and an operation of the test station virtually testing the vehicle;
a first emulator in communication with the vehicle communication part and controlling the operation of the vehicle in the test station according to the test list and according to instruction of the test manager; and
a controller in communication with the station manager and controlling the operation of the test station according to the test list and according to instruction of the test manager.