CPC G03F 7/70866 (2013.01) [G03F 7/70491 (2013.01); G03F 7/70741 (2013.01); G05B 19/4155 (2013.01); G06N 20/00 (2019.01); G05B 2219/39147 (2013.01); G05B 2219/45031 (2013.01)] | 20 Claims |
1. A stocker system, comprising:
a storage pod configured to store one or more masks, the storage pod contained in a stocker;
a controller operatively coupled to the stocker system, the controller is configured to control at least one of air flow supply to the storage pod, hydrocarbon concentration in the stocker, oxygen concentration in the storage pod, humidity within the storage pod, pressure within the storage pod, or temperature in the storage pod;
an artificial intelligence training circuitry operatively connected to the controller, the artificial intelligence training circuitry configured to recognize data patterns of at least one of the air flow supply to the storage pod, the hydrocarbon concentration in the stocker, the oxygen concentration in the storage pod, the humidity within the storage pod, the pressure within the storage pod or the temperature in the storage pod;
an automated machinery configured to transfer the storage pod into and out of the stocker; and
a safety interlock assembly operatively coupled to the controller, the safety interlock assembly including:
an operator equipment scanning assembly configured to determine whether equipment for operators entering into the stocker system is functionally operating; and
an operator identifier scanning assembly configured to scan an identification of operators entering the stocker system.
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