CPC H01L 21/67742 (2013.01) [H01L 21/67784 (2013.01); H01L 21/68721 (2013.01)] | 12 Claims |
1. A transfer device comprising:
a first holding part configured to contact an edge part of a substrate when holding the substrate;
a second holding part formed with an elastic member and configured to contact only a back surface of the substrate when holding the substrate; and
a control device,
wherein the control device is configured to control the transfer device such that a transfer speed when the substrate is held by the first holding part is greater than a transfer speed when the substrate is held by the second holding part, and
wherein the first holding part is provided at a position where the first holding part does not contact the substrate being held by the second holding part, and the second holding part is provided at a position where the second holding part does not contact the substrate being held by the first holding part.
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