CPC G01N 21/1717 (2013.01) [G01N 2021/1725 (2013.01); G01N 2201/0636 (2013.01); G06F 3/011 (2013.01)] | 8 Claims |
1. An optical module, comprising:
a carrier configured to face an object to be inspected;
an emitter device disposed adjacent to the carrier and configured to emit a first light;
a receiver device disposed between the carrier and the object; and
an optical device configured to direct the first light toward the object;
wherein the receiver device is configured to receive a second light reflected by the object, wherein the optical device is configured to direct the first light into a first region of the object and into a second region distinct from the first region.
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