CPC H01J 37/3244 (2013.01) [C23C 16/45565 (2013.01); C23C 16/505 (2013.01); H01J 37/32357 (2013.01); H01J 37/32422 (2013.01); H01J 2237/332 (2013.01)] | 20 Claims |
1. A showerhead assembly for use in a process chamber, comprising:
a heated showerhead having a heater and a gas diffusion plate coupled to the heater, the gas diffusion plate having a plurality of channels extending through the gas diffusion plate;
an ion filter spaced from the heated showerhead, the ion filter having a first side facing the heated showerhead and a second side opposite the first side, the ion filter having a plurality of channels extending through the ion filter;
a heat transfer ring in contact with the heated showerhead and the ion filter, the heat transfer ring being thermally conductive and electrically insulative, the heat transfer ring comprised of a plurality of elements separated from one another along an interface between the heated showerhead and the ion filter; and
a remote plasma region defined between the heated showerhead and the ion filter.
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