CPC G01N 1/02 (2013.01) [G01N 15/02 (2013.01); G01N 15/065 (2013.01); G01N 15/14 (2013.01); G01N 2001/028 (2013.01); G01N 2015/0019 (2013.01); G01N 2015/0294 (2013.01); G01N 2015/1493 (2013.01); G01N 2015/1497 (2013.01)] | 20 Claims |
1. A method comprising:
causing, by a processing device associated with a particle detection system:
a distribution unit of the particle detection system to initiate a particle collection process to dislodge one or more surface particles from a surface of an article based on a stream comprising at least one of solid carbon dioxide (CO2) particles or CO2 droplets directed toward the article, and
the one or more dislodged surface particles to be collected on a surface of a substrate, wherein the substrate has a pre-determined initial state comprising initial surface particles on the surface of the substrate;
obtaining, by the processing device, a measurement indicating a particle number concentration of one or more detectable surface particles on the substrate after the particle collection process is completed;
identifying, by the processing device, an initial particle number concentration of the initial surface particles of the pre-determined initial state; and
determining, by the processing device, a number of particles transported away from the surface of the article based on the obtained measurement and the identified initial particle concentration.
|