CPC G03F 7/0046 (2013.01) [C08F 212/22 (2020.02); C08F 220/281 (2020.02); C08F 220/282 (2020.02); C08F 220/301 (2020.02); C08F 220/387 (2020.02); C09D 125/18 (2013.01); C09D 133/16 (2013.01); G03F 7/0045 (2013.01); G03F 7/0382 (2013.01); G03F 7/0392 (2013.01)] | 14 Claims |
1. A resist composition comprising
an ammonium salt and fluorine-containing polymer comprising repeat units AU having an ammonium salt structure of a carboxylic acid having an iodine or bromine-substituted aromatic ring and repeat units of at least one type selected from repeat units FU-1 having a trifluoromethylalcohol group which may be substituted with an acid labile group and repeat units FU-2 having a fluorinated hydrocarbyl group, and
a base polymer.
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