US 12,169,362 B2
Chemical liquid, chemical liquid storage body, chemical liquid filling method, and chemical liquid storage method
Tetsuya Kamimura, Haibara-gun (JP); and Satomi Takahashi, Haibara-gun (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on Jul. 6, 2023, as Appl. No. 18/218,727.
Application 18/218,727 is a division of application No. 17/740,438, filed on May 10, 2022, granted, now 11,740,557.
Application 17/740,438 is a division of application No. 16/365,016, filed on Mar. 26, 2019, granted, now 11,360,389, issued on Jun. 14, 2022.
Application 16/365,016 is a continuation of application No. PCT/JP2017/030885, filed on Aug. 29, 2017.
Claims priority of application No. 2016-188273 (JP), filed on Sep. 27, 2016.
Prior Publication US 2023/0350306 A1, Nov. 2, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. C11D 3/16 (2006.01); B65D 88/06 (2006.01); B65D 88/08 (2006.01); C08F 10/06 (2006.01); C08F 14/26 (2006.01); C11D 3/20 (2006.01); C11D 3/43 (2006.01); C11D 7/22 (2006.01); C11D 7/26 (2006.01); C11D 7/50 (2006.01); G03F 7/16 (2006.01); G03F 7/32 (2006.01); H01L 21/027 (2006.01)
CPC G03F 7/325 (2013.01) [B65D 88/06 (2013.01); B65D 88/08 (2013.01); C08F 10/06 (2013.01); C08F 14/26 (2013.01); G03F 7/16 (2013.01); H01L 21/0274 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A chemical liquid storage body comprising:
a storage tank; and
the chemical liquid that is stored in the storage tank,
wherein the chemical liquid comprises:
an organic solvent;
a metal impurity; and
an organic impurity,
wherein the metal impurity contains metal atoms,
a total content of the metal atoms in the chemical liquid with respect to a total mass of the chemical liquid is equal to or smaller than 50 mass ppt,
a total content of the organic impurity in the chemical liquid with respect to the total mass of the chemical liquid is 0.1 to 10,000 mass ppm,
the organic impurity contains an alcohol impurity,
a mass ratio of a content of the alcohol impurity to the total content of the organic impurity is 0.0001 to 0.5, and
a ratio of a headspace portion in the storage tank to the internal volume of the storage tank is 0.5% to 30% by volume.