Subclass
Subgroup
Patent
H01L
21/02043
12170195
21/02049
12170196
21/0228
12170197
12170198
21/02282
12170199
21/0262
12170200
21/0338
12170201
21/28088
12170202
21/28123
12170203
21/304
12170204
21/31144
12170205
21/32135
12170206
21/563
12170207
21/67017
12170208
21/6708
12170209
12170210
21/67092
12170211
12170212
21/67115
12170213
21/67248
12170214
21/67259
12170215
21/67742
12170216
21/6833
12170217
12170218
12170219
21/68707
12170220
21/6875
12170221
21/68764
12170222
21/76898
12170223
21/78
12170224
12170225
21/8213
12170226
21/8221
12170227
21/823431
12170228
21/823481
12170229
21/823807
12170230
21/823857
12170231
22/12
12170232
22/26
12170233
22/34
12170234
23/10
12170235
23/18
12170236
23/3675
12170237
23/373
12170238
23/3735
12170239
23/49513
12170240
23/49589
12170241
23/49816
12170242
23/49827
12170243
23/5226
12170244
12170245
12170246
23/528
12170247
23/53276
12170248
23/5385
12170249
23/5386
12170250
23/5389
12170251
12170252
23/585
12170253
23/62
12170254
23/66
12170255
24/05
12170256
24/08
12170257
12170258
12170259
24/16
12170260
24/20
12170261
24/85
12170262
24/96
12170263
25/0652
12170264
25/0657
12170265
12170266
12170267
12170268
25/0753
12170269
12170270
25/167
08124988
12170271
12170272
25/18
12170273
12170274
12170275
12170276
27/0207
12170277
12170278
27/088
12170279
27/0886
12170280
27/092
12170281
27/0924
12170282
27/0928
12170283
27/1203
12170284
27/1218
12170285
12170286
27/124
12170287
12170288
12170289
12170290
12170291
27/1248
12170292
12170293
27/1255
12170294
27/1288
12170295
27/14605
12170296
27/14612
12170297
27/14614
12170298
27/14621
12170299
12170300
27/14623
12170301
27/14629
12170302
27/14634
12170303
27/14647
12170304
27/14659
12170305
27/14818
12170306
27/156
12170307
12170308
12170309
28/40
12170310
29/063
12170311
29/0634
12170312
29/0642
12170313
29/0653
12170314
29/0673
12170315
29/2003
12170316
29/24
12170317
29/36
12170318
29/41791
12170319
12170320
29/42368
12170321
29/42392
12170322
12170323
29/517
12170324
29/66507
12170325
29/66666
12170326
29/66795
12170327
29/7786
12170328
29/7816
12170329
29/7827
12170330
29/785
12170331
12170332
29/7851
12170333
29/7856
12170334
29/78618
12170335
29/7869
12170336
12170337
12170338
12170339
29/86
12170340
31/1075
12170341
33/06
12170342
33/382
12170343
12170344
12170345
33/505
12170346
33/62
12170347
12170348
12170349