US 12,169,209 B2
Nanoscale scanning sensors
Michael S. Grinolds, Cambridge, MA (US); Sungkun Hong, Cambridge, MA (US); Patrick Maletinsky, Cambridge, MA (US); and Amir Yacoby, Cambridge, MA (US)
Assigned to President and Fellows of Harvard College, Cambridge, MA (US)
Filed by President and Fellows of Harvard College, Cambridge, MA (US)
Filed on Oct. 12, 2023, as Appl. No. 18/485,478.
Application 18/485,478 is a continuation of application No. 17/675,156, filed on Feb. 18, 2022, granted, now 11,815,528.
Application 17/675,156 is a continuation of application No. 15/965,175, filed on Apr. 27, 2018, abandoned.
Application 15/965,175 is a continuation of application No. 14/423,123, granted, now 10,041,971, issued on Aug. 7, 2018, previously published as PCT/US2013/055644, filed on Aug. 20, 2013.
Claims priority of provisional application 61/692,077, filed on Aug. 22, 2012.
Prior Publication US 2024/0044938 A1, Feb. 8, 2024
Int. Cl. G01Q 70/14 (2010.01); G01N 21/64 (2006.01); G01N 24/10 (2006.01); G01Q 30/02 (2010.01); G01Q 60/08 (2010.01); G01Q 60/38 (2010.01); G01Q 60/54 (2010.01); G01R 33/022 (2006.01); G01R 33/032 (2006.01); G01R 33/12 (2006.01); G01R 33/32 (2006.01); G01R 33/60 (2006.01)
CPC G01Q 70/14 (2013.01) [G01N 21/645 (2013.01); G01N 24/10 (2013.01); G01Q 60/38 (2013.01); G01Q 60/54 (2013.01); G01R 33/022 (2013.01); G01R 33/032 (2013.01); G01R 33/1284 (2013.01); G01R 33/60 (2013.01); G01N 2201/10 (2013.01); G01Q 30/025 (2013.01); G01Q 60/08 (2013.01); G01R 33/323 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An atomic force microscope platform formed of monolithic diamond material, the atomic force microscope platform comprising:
one or more spin defects configured to emit fluorescent light; and
an optical outcoupling structure formed by the monolithic diamond material and configured to optically guide the fluorescent light emitted by the one or more spin defects toward an output end of the optical outcoupling structure,
wherein the one or more spin defects are located no more than 50 nm from a sensing surface of the atomic force microscope platform;
wherein the atomic force microscope platform including the optical outcoupling structure is formed of a diamond component having at least one linear dimension greater than 1 μm in length;
wherein the atomic force microscope platform further comprises an attachment region located remote from the outcoupling structure and configured to be attached to an atomic force microscope.