US 12,169,208 B2
Probe tip X-Y location identification using a charged particle beam
Richard E Stallcup, II, Frisco, TX (US); Michael Berkmyre, Princeton, TX (US); Ronen Benzion, Los Altos, CA (US); and Carlo Floresca, Frisco, TX (US)
Assigned to Innovatum Instruments Inc., Los Altos, CA (US)
Filed by Innovatum Instruments Inc., Los Altos, CA (US)
Filed on Nov. 29, 2022, as Appl. No. 18/070,659.
Claims priority of provisional application 63/284,310, filed on Nov. 30, 2021.
Prior Publication US 2023/0168274 A1, Jun. 1, 2023
Int. Cl. H01J 37/22 (2006.01); G01Q 20/00 (2010.01); G01Q 60/40 (2010.01); H01J 37/28 (2006.01)
CPC G01Q 20/00 (2013.01) [G01Q 60/40 (2013.01); H01J 37/28 (2013.01)] 28 Claims
OG exemplary drawing
 
1. A method performed in a charged particle imaging system, the method comprising:
activating a charged particle beam within a first reference frame, the first reference frame associated with the charge particle beam;
correlating a sample stage reference frame with a sample reference frame;
causing, by a computerized control system, the charged particle beam and a conductive probe to intersect;
measuring an electrical response from a location where the charged particle beam and the conductive probe intersect;
determining a location of the conductive probe in a second reference frame based on the electric response from the intersection of the charged particle beam with the conductive probe, the second reference frame associated with the conductive probe; and
correlating the location of the conductive probe in the second reference frame with the first reference frame.