US 12,168,301 B2
Fixture for automatic calibration of substrate transfer robot
Richard Blank, San Jose, CA (US); Aravind Alwan, Milpitas, CA (US); Behnam Behziz, Newark, CA (US); Peter Thaulad, San Jose, CA (US); and Mark E. Emerson, Newberg, OR (US)
Assigned to LAM RESEARCH CORPORATION, Fremont, CA (US)
Appl. No. 17/435,020
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Feb. 27, 2020, PCT No. PCT/US2020/020116
§ 371(c)(1), (2) Date Aug. 30, 2021,
PCT Pub. No. WO2020/180607, PCT Pub. Date Sep. 10, 2020.
Claims priority of provisional application 62/813,371, filed on Mar. 4, 2019.
Prior Publication US 2022/0134568 A1, May 5, 2022
Int. Cl. B25J 11/00 (2006.01); B25J 9/16 (2006.01); B25J 21/00 (2006.01)
CPC B25J 9/1692 (2013.01) [B25J 9/1697 (2013.01); B25J 11/0095 (2013.01); B25J 21/005 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A robot calibration system, comprising:
a calibration fixture configured to be mounted on a substrate processing chamber, wherein the calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate; and
a controller configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.