CPC H05G 2/008 (2013.01) [G03F 7/70033 (2013.01); G03F 7/7085 (2013.01)] | 20 Claims |
1. A method of mitigating debris in a plasma-generating process, the method comprising:
accessing first information relating to a temporal property of an amplified optical beam pulse that interacts with a target comprising target material at a plasma formation location;
accessing second information relating to a temporal property of a light-emitting plasma produced when some of the target material of the target is converted into the light-emitting plasma during the plasma-generating process; and
determining an amount of target material converted to the light-emitting plasma by comparing the first information and the second information.
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