US 12,170,869 B2
Fixed-fixed membrane for microelectromechanical system microphone
Joseph Seeger, Menlo Park, CA (US); Sushil Bharatan, Burlington, MA (US); Andrew Randles, Abington, MA (US); and Michael John Foster, Groton, MA (US)
Assigned to INVENSENSE, INC., San Jose, CA (US)
Filed by INVENSENSE, INC., San Jose, CA (US)
Filed on Sep. 13, 2022, as Appl. No. 17/931,783.
Prior Publication US 2024/0089668 A1, Mar. 14, 2024
Int. Cl. H04R 19/04 (2006.01); B81B 3/00 (2006.01)
CPC H04R 19/04 (2013.01) [B81B 3/0072 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/019 (2013.01); H04R 2201/003 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A microelectromechanical system (MEMS) acoustic sensor comprising:
a substrate;
a membrane situated parallel to the substrate; and
at least one vent formed into the membrane, wherein a portion of the at least one vent is a curved opening in the membrane, wherein the at least one vent is disposed substantially along a side of the membrane, wherein at least a portion of the at least one vent is semi-elliptical, and wherein a major axis of the at least one vent is along the side of the membrane.