CPC H01L 23/49513 (2013.01) [H01L 21/4825 (2013.01); H01L 23/49503 (2013.01); H01L 23/49541 (2013.01); H01L 23/49548 (2013.01); H01L 23/562 (2013.01); H01L 24/29 (2013.01)] | 20 Claims |
1. A device, comprising:
a die pad including:
a surface; and
first, second, third, and fourth cavities extending in to the surface and separated from each other by portions of the die pad, the first, second, third, and fourth cavities extending partially into the die pad such that each of the first, second, third, and fourth cavities includes a base, the first and second cavities being aligned with each other in a first direction, the third and fourth cavities being aligned with each other in the first direction, the first and third cavities being aligned with each other in a second direction that is transverse to the first direction, the second and fourth cavities being aligned with each other in the second direction, each of the first, second, third, and fourth cavities having an L shape with a first portion extending in the first direction and a second portion extending in the second direction, the surface of the die pad being continuous except for the first, second, third, and fourth cavities; and
a plurality of leads surrounding the die pad.
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