US 12,170,220 B2
Robot for simultaneous substrate transfer
Jason M. Schaller, Austin, TX (US); Luke Bonecutter, Cedar Park, TX (US); Charles T. Carlson, Austin, TX (US); Rajkumar Thanu, Santa Clara, CA (US); Karuppasamy Muthukamatchi, Bangalore (IN); Jeff Hudgens, San Francisco, CA (US); and Benjamin Riordon, Newburyport, MA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 8, 2022, as Appl. No. 17/940,369.
Application 17/940,369 is a continuation of application No. 16/922,727, filed on Jul. 7, 2020, granted, now 11,443,973.
Claims priority of provisional application 62/873,458, filed on Jul. 12, 2019.
Prior Publication US 2023/0005783 A1, Jan. 5, 2023
Int. Cl. H01L 21/67 (2006.01); B65G 47/90 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/68707 (2013.01) [B65G 47/90 (2013.01); H01L 21/67196 (2013.01)] 20 Claims
OG exemplary drawing
 
18. A transfer apparatus, comprising:
a central hub including a first shaft and a second shaft extending about and concentric with the first shaft, wherein the second shaft is counter-rotatable with the first shaft, and wherein the central hub is characterized by a central axis;
a flexible drive coupled with the first shaft, the flexible drive being configured to enable the first shaft to bend outward from the central axis; and
an end effector coupled with the first shaft, the end effector comprising a body having a plurality of arms.