CPC H05B 47/16 (2020.01) [G01J 5/10 (2013.01); G05D 23/20 (2013.01); H05B 45/18 (2020.01); H05B 47/155 (2020.01)] | 20 Claims |
1. An optical heating device for heating a substrate, the optical heating device comprising:
a chamber for accommodating the substrate;
a support member for supporting the substrate in the chamber;
a plurality of LED elements for emitting light toward the substrate supported by the support member;
a flash lamp for emitting light toward the substrate supported by the support member;
a first lighting control unit for controlling the lighting of the flash lamp after a predetermined time has elapsed since the time of lighting the LED elements; and
a second lighting control unit for reducing the power supplied to the LED elements before the first lighting control unit controls the lighting of the flash lamp.
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