CPC G03F 7/70516 (2013.01) [G03F 7/70591 (2013.01)] | 30 Claims |
1. A method of generating a test for a radiation source for a lithographic apparatus, the method comprising the steps of:
receiving data corresponding to a plurality of firing patterns of the radiation source; and
analyzing the data to determine parameters for configuring one or more further firing patterns for testing the radiation source;
wherein the parameters are determined such that a stability of the radiation source when executing the one or more further firing patterns configured using the parameters is substantially the same as, or within predefined bounds relative to, a stability of the radiation source when executing the plurality of firing patterns,
and a total duration of the one or more further firing patterns when executed by the radiation source will be less than a duration of the plurality of firing patterns when executed by the radiation source.
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