US 12,170,183 B2
Charged particle microscope device and method for adjusting field-of-view thereof
Mitsutoshi Kobayashi, Tokyo (JP); Atsushi Miyamoto, Tokyo (JP); and Yoshinobu Hoshino, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/761,449
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Sep. 20, 2019, PCT No. PCT/JP2019/037086
§ 371(c)(1), (2) Date Mar. 17, 2022,
PCT Pub. No. WO2021/053826, PCT Pub. Date Mar. 25, 2021.
Prior Publication US 2022/0351935 A1, Nov. 3, 2022
Int. Cl. H01J 37/22 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/222 (2013.01) [H01J 37/28 (2013.01); H01J 2237/153 (2013.01); H01J 2237/226 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method for adjusting a field-of-view of a charged particle microscope device, the method comprising, with use of the charged particle microscope device:
a reference data setting step of setting reference data for a sample;
a region of interest setting step of setting a plurality of regions of interest for the reference data;
a sampling coordinate setting step of setting a rough sampling coordinate group for each of the plurality of regions of interest;
a sampling coordinate imaging step of irradiating the sample with charged particles based on the sampling coordinate group to obtain a corresponding pixel value group;
a reconstructed image generating step of generating, based on the pixel value group, a plurality of reconstructed images corresponding to the plurality of regions of interest;
a correspondence relationship estimating step of estimating, based on the plurality of reconstructed images, a correspondence relationship among the plurality of regions of interest; and
a region of interest adjusting step of adjusting the plurality of regions of interest based on the correspondence relationship, wherein
in the sampling coordinate setting step, the sampling coordinate group is set based on the reference data.