US 12,171,146 B2
Vibrator device
Shoichiro Kasahara, Minowa (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Aug. 11, 2021, as Appl. No. 17/399,508.
Claims priority of application No. 2020-136444 (JP), filed on Aug. 12, 2020.
Prior Publication US 2022/0052250 A1, Feb. 17, 2022
Int. Cl. H01L 41/053 (2006.01); H10N 30/20 (2023.01); H10N 30/87 (2023.01); H10N 30/88 (2023.01)
CPC H10N 30/20 (2023.02) [H10N 30/872 (2023.02); H10N 30/88 (2023.02)] 8 Claims
OG exemplary drawing
 
1. A vibrator device comprising:
a package including a base that is a semiconductor substrate and a lid that is a semiconductor substrate and has a housing section;
a vibrator element and a passive element housed in the housing section and placed at the base;
an oscillation circuit placed at the base and electrically coupled to the vibrator element; and
a circuit that is placed at the base or the lid, is electrically coupled to the passive element, and operates based on an oscillation signal from the oscillation circuit,
wherein the housing section includes a first housing section that houses the vibrator element and a second housing section that houses the passive element, the first and second housing sections being separated by perimeter walls of the lid that extend about a perimeter of the lid and a center wall that extends in a direction towards and contacts the base, the perimeter walls and the center wall collectively defining a first recess of the lid that defines the first housing section and a second recess of the lid that defines the second housing section.