US 12,170,184 B2
Transmission electron microscope and inspection method using transmission electron microscope
Toshie Yaguchi, Tokyo (JP); Keiji Tamura, Tokyo (JP); Hiromi Mise, Tokyo (JP); Yasuyuki Nodera, Tokyo (JP); Akiko Wakui, Tokyo (JP); and Keisuke Igarashi, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/594,658
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Apr. 26, 2019, PCT No. PCT/JP2019/017938
§ 371(c)(1), (2) Date Oct. 25, 2021,
PCT Pub. No. WO2020/217456, PCT Pub. Date Oct. 29, 2020.
Prior Publication US 2022/0244201 A1, Aug. 4, 2022
Int. Cl. H01J 37/26 (2006.01); G01N 23/20 (2018.01); H01J 37/295 (2006.01)
CPC H01J 37/26 (2013.01) [G01N 23/20 (2013.01); H01J 37/265 (2013.01); H01J 37/295 (2013.01); G01N 2223/418 (2013.01); H01J 2237/0458 (2013.01); H01J 2237/1507 (2013.01); H01J 2237/2802 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A transmission electron microscope comprising:
an irradiation unit configured to irradiate a sample with an electron beam;
an objective lens configured to form an image of the electron beam transmitted through the sample;
a beam deflector that is located above a position at which the sample is to be positioned and that is configured to deflect the electron beam;
an objective aperture configured to pass only a part of the electron beam transmitted through the sample;
a detection unit configured to detect the electron beam transmitted through the sample; and
a control unit, wherein
the control unit controls a deflection angle of the electron beam by the beam deflector such that the sample is irradiated while the electron beam precesses at a predetermined angle with respect to an optical axis, and that only a diffracted wave and/or a scattered wave at a desired angle among diffracted waves and/or scattered waves generated by the electron beam passing through the sample passes through the objective aperture,
the control unit is capable of generating a dark field transmission electron microscopy image based on a detection signal in the detection unit of the diffracted wave and/or the scattered wave diffracted and/or scattered at a predetermined angle, and
the control unit displays, in a superimposed manner on a display unit electrically coupled to the detection unit, a diffraction pattern of the sample and an annular display that indicates a diffraction region and a scattering region used for generation of the dark field transmission electron microscopy image, that has a width corresponding to a diameter of the objective aperture, and that has a radius corresponding to an angle of precession of the electron beam.