US 12,169,185 B2
Tunnel junctions in microfluidic arrays for molecular recognition
Yann Astier, Livermore, CA (US); and Juraj Topolancik, Redwood City, CA (US)
Assigned to Roche Sequencing Solutions, Inc., Pleasanton, CA (US)
Filed by Roche Sequencing Solutions, Inc., Pleasanton, CA (US)
Filed on Jun. 30, 2023, as Appl. No. 18/216,795.
Application 16/750,574 is a division of application No. 15/661,931, filed on Jul. 27, 2017, granted, now 10,591,440, issued on Mar. 17, 2020.
Application 18/216,795 is a continuation of application No. 17/490,479, filed on Sep. 30, 2021, granted, now 11,726,059.
Application 17/490,479 is a continuation of application No. 16/750,574, filed on Jan. 23, 2020, granted, now 11,137,371, issued on Oct. 5, 2021.
Claims priority of provisional application 62/369,704, filed on Aug. 1, 2016.
Prior Publication US 2023/0349857 A1, Nov. 2, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01N 27/447 (2006.01); B01L 3/00 (2006.01); G01N 27/327 (2006.01); G01N 33/487 (2006.01); H10N 50/01 (2023.01); H10N 50/80 (2023.01); H10N 50/85 (2023.01)
CPC G01N 27/44791 (2013.01) [B01L 3/502715 (2013.01); B01L 3/50273 (2013.01); G01N 27/3278 (2013.01); G01N 33/48721 (2013.01); H10N 50/01 (2023.02); H10N 50/80 (2023.02); H10N 50/85 (2023.02); B01L 2300/0645 (2013.01); B01L 2300/0887 (2013.01); B01L 2400/0421 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of manufacturing a device for analyzing a molecule, the method comprising:
depositing a first conductive element on a surface of an insulating substrate;
depositing an insulating layer on a sidewall of the first conductive element;
ion beam etching at an angle the insulating layer on the sidewall of the first conductive element to form a tapered insulating layer;
depositing a second conductive element contacting the tapered insulating layer; and
planarizing at least one of the first conductive element or the second conductive element to expose the tapered insulating layer.