Subclass | Subgroup | Patent |
G03F | 1/38 | 12169356 |
1/82 | 12169357 | |
7/0002 | 12169358 | |
7/001 | 12169359 | |
7/0046 | 12169360 | |
7/162 | 12169361 | |
7/325 | 12169362 | |
7/70516 | 12169363 | |
7/70641 | 12169364 | |
12169365 | ||
7/70683 | 12169366 | |
7/70725 | 12169367 | |
7/70775 | 12169368 | |
7/70866 | 12169369 | |
9/7088 | 12169370 |