CPC H04R 19/04 (2013.01) [B81B 3/0072 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/019 (2013.01); H04R 2201/003 (2013.01)] | 20 Claims |
1. A microelectromechanical system (MEMS) acoustic sensor comprising:
a substrate;
a membrane situated parallel to the substrate; and
at least one vent formed into the membrane, wherein a portion of the at least one vent is a curved opening in the membrane, wherein the at least one vent is disposed substantially along a side of the membrane, wherein at least a portion of the at least one vent is semi-elliptical, and wherein a major axis of the at least one vent is along the side of the membrane.
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