CPC G03F 7/325 (2013.01) [B65D 88/06 (2013.01); B65D 88/08 (2013.01); C08F 10/06 (2013.01); C08F 14/26 (2013.01); G03F 7/16 (2013.01); H01L 21/0274 (2013.01)] | 9 Claims |
1. A chemical liquid storage body comprising:
a storage tank; and
the chemical liquid that is stored in the storage tank,
wherein the chemical liquid comprises:
an organic solvent;
a metal impurity; and
an organic impurity,
wherein the metal impurity contains metal atoms,
a total content of the metal atoms in the chemical liquid with respect to a total mass of the chemical liquid is equal to or smaller than 50 mass ppt,
a total content of the organic impurity in the chemical liquid with respect to the total mass of the chemical liquid is 0.1 to 10,000 mass ppm,
the organic impurity contains an alcohol impurity,
a mass ratio of a content of the alcohol impurity to the total content of the organic impurity is 0.0001 to 0.5, and
a ratio of a headspace portion in the storage tank to the internal volume of the storage tank is 0.5% to 30% by volume.
|